异常放电防止单元
A2K 系列
A2K-20K
アルバック
能在原来的电源上简单的追加,低成本实现产量和良率提高。
特点
- 高产量
通过减少异常放电可以输入更高功率 - 基板损伤减少
能够减少电弧引起的基板损 - 控制基板的问题
与RF溅射相比,可以降低基板温度 - 简单的连接性
可以连接到现有设备 - 可变的反向脉冲频率
A2KH-25/50:1kHz ~ 20kHz、A2K-20K/40K:1kHz ~ 50kHz范围内可使用 - 脉冲同步系统
可以输出多个A2K单元的同步脉冲 *2 *3 - 主从连接可实现大容量
A2K-20K、40K最多可以6台并联运行
应用:脉冲同步系统
![a2kdata.jpg](../../../../../ja/products/a2kdata.jpg)
当同一个腔室内阴极互相靠近相对,或者,当多个A2K放电彼此干扰时。通过使用相位控制功能,可以使A2K的反向脉冲同相并防止放电干扰。*3 *4
*1:可以与弊社DC电源连接
*2:使用A2KH-25,50,A2K-20K,40K不能执行脉冲同步和并行操作。
*3:A2KH-25/50需要外部同步单元(PHSM / PHSS)
*4:A2K-20K / 40K需要光同步电缆(Pulse link cable)
用途
- FPD用反应溅射设备
- 工业涂层用反应溅射设备
- 彩色TFT用反应溅射设备
规格
Model | A2KH-25 | A2KH-50 | A2K-20K | A2K-40K | |
Control power input | Input | AC90 to 110V | AC100 to 240V | ||
Frequency | Single phase 50/60Hz | ||||
Power | 100VA | 120VA | 400VA | ||
Leak current | 1mA or less | ||||
Input specification | Operating voltage | -100 to -800V | |||
Operating current | 0 to 25A | 0 to 50A | 0 to 50A | 0 to 100A | |
Input structure | Connector connection | Terminal block or connector connection | Connector connection | ||
Output specification | Pulse range | 5μs/10μs ( Internal switch switching ) | 1 to 18μs (There is a frequency limitation) | ||
Oscillating frequency | ・Pulse range 5μs: 2,5,10,15,20kHz ・Pulse range 10μs: 1,2.5,5,7.5,10kHz |
1 to 50KHz Variable in 1KHz increments |
|||
Inversion pulse voltage | 10 to 20% of the DC power generator output voltages. ( It depends on a load impedance ) | ||||
Withstand voltage | Continuous operation | -1500Vdc | |||
Parallel operation | Nothing | Up to 6units can be controlled *5 | |||
Cooling method | Forced air-cooling | ||||
Dimension(W×D×H) | 238×450×149mm | 430×450×149mm | 483×630×177mm | ||
Weight | 16kg | 27kg | 30kg | 45kg | |
Applicable standard | RoHs |
Ambient operating temperature 5℃ to 40℃ (no condensation)
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.
*5: A2K-20K and A2K-40K cannot be used together.