DC-20-4-AM｜大容量DC电源｜DC电源｜产品中心｜ULVAC SHOWCASE

大容量DC电源

DC-20-4-AM

DC-10和DC-20是10kW及20kW输出功率的溅射用DC電源。它由可靠的部件和电路组成。
它是等离子体负载的最佳可靠电源，其设计反映了包括电源应用在内的多年积累的专业知识。

特点

轻量・省空间
轻量・省空间的设计，安装简易
输出电压范围可选
除800V规格外，还提供1000V规格。
丰富的电弧处理
丰富的电弧控制系统。
不需要冷却水
强制空冷系统，不需要冷却水。
可以安装高速电弧中断回路
实现标准的低电弧能量。此外，可以安装可选的高速电弧中断电路。
自由的并联操作功能
DC-10，DC-20：可选的并联运行功能允许自由组合10kW和20kW，并联运行多达12个单元。（最高240千瓦）

用途

FPD用溅射设备
半导体用溅射设备
触摸屏用溅射设备用
工业涂层用溅射设备

规格

Model		DC-10-AM	DC-10-H-AM	DC-10-4-AM	DC-20-AM	DC-20-H-AM	DC-20-4-AM
Input specification	Rated input voltage	3-Phase 187 to 229VAC		3-Phase AC342 to 440V	3-Phase 187 to 229VAC		3-Phase AC342 to 440V
	Input capacity	13.5kVA or less			25kVA or less
Output specification	Maximum rated power	10kW			20kW
	Rated current	25A	18A	25A	50A	40A	50A
	Rated voltage	-800V	-1000V	-800V	-800V	-1000V	-800V
	Ignition voltage	-1500V
	Abnormal discharge control	Shutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected
Control	Control method	Constant power control (P control)/constant current control (I control)/constant voltage control (V control)
	Control precision	Constant power control (P Control)：±0.5% or less of the rated output or ±1％ of the set value, whichever is larger. Constant current control (I Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger. Constant voltage control (V Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger.
	Control warranty scope	Constant power control, 10 to 100％ of rated power value
	Extenal interface	analog/digital,RS-232C or 485
Parallel operation		Up to 12units can be controlled by master/slave communication
Cooling method		Forced air-cooling
Dimension　W×D×H		483×630×133mm (excluding protrusions)
Weight		29kg			36kg
Applicable standard		CE/ SEMI F47/ RoHS