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红外镀金聚焦炉/RTA装置
红外镀金聚焦炉
RHL-E/VHT/P系列
アルバック販売
从高速加热到广域加热都可满足客户的需求。
特点
- 具有抛物反射表面的平行红外光，可以均匀地加热大面积区域
用途
- Si、化合物半导体的RTA
- 玻璃・陶瓷基板的退火炉
- 金属环境退火炉
- 复合材料的耐热评估炉
- 高温张力・雅俗试验用加热炉
规格
- E type
- VHT type
- P type
| Model*1 | Heating Method | Max. Heating Temperature*2 |
Heating Length (Light Emission Length) |
Lamp Voltage |
Input |
|---|---|---|---|---|---|
| E110L | Focused light single surface heating | － | 265mm | 200V | 2.0kW |
| E25N | Focused light cylindrical heating | 1100℃ | 140mm | 100V | 2.0kW |
| E25P | 1300℃ | 200V | 2.4kW | ||
| E45N | 1100℃ | 100V | 4.0kW | ||
| E45P | 1400℃ | 200V | 4.8kW | ||
| E410N | 1100℃ | 265mm | 200V | 4.0kW | |
| E410P | 1400℃ | 8.0kW | |||
| VHT-E44 | 1700℃ | 100mm | 200V | 8.0kW | |
| VHT-E64 | 12.0kW | ||||
| VHT-E48 | 1800℃ | 225mm | 480V | 24.0kW | |
| VHT-E68 | 36.0kW | ||||
| P44CP | Parallel light cylindrical heating | 1200℃ | 100mm | 100V | 4.0kW |
| P48CP | 200mm | 200V | 6.4kW | ||
| P410CP | 265mm | 8.0kW | |||
| P65CN | 900℃ | 140mm | 100V | 6.0kW | |
| P65CP | 1200℃ | 200V | 7.2kW | ||
| P610CN | 900℃ | 265mm | 6.0kW | ||
| P610CP | 1200℃ | 12.0kW | |||
| P810CN | 900℃ | 8.0kW | |||
| P810CP | 1100℃ | 16.0kW |
＊1 Model number meaning
For E410N
- E : Reflecting surface type
- E : Ellipsoidal reflection , P：Parabolodial reflection
- 4 : Lamp number
- 10 : Lamp length
- N : Heating method, Lamp type
- L : Linear focused light , C : Cylindrical heating , N : N lamp , P : P lamp
＊2 Maximum heating temperature changes according to the heated sample’s infrared reflectance, absorption, heat capacity, and material.
・Please be aware that heating furnaces require cooling water.
・Heating temperature changes according to the heated sample’s infrared reflectance, absorption, heat capacity, and material.
・For other specification requirements, please feel free to contact us.
Principles
Radiant spectral distribution of infrared lamp
1.Radiation heating
The infrared gold image furnace is a radiation heating furnace that uses an infrared lamp with high energy density as heating source.
The furnace body is made of aluminum alloy with water cooled and the reflection surface of the infrared rays is polished and coated with gold which has a high reflection.
2.Infrared lamp
The tungsten filament is sealed in a quartz glass made tube, which the peak of the spectrum is approximately 1.15μm in the near infrared region.
The infrared lamp provide the energy density 10 to 15 times as high as the conventional heating element.
3.Reflector
The reflector is machined with high precision curvature to enhance the reflectance and inhabit the deterioration.
The reflector is available in two types due to its shape, one is elliptical type and the other is parabolic type. The model RHL-E and VHT-E series have a elliptical type reflector and is suitable for the heating of the rod shaped sample, and the other model: RHL-P,RHL-Ps and RHL-Pss series have a parabolic type reflector and is suitable for the sheet shaped sample.
E type
Maximum heat speed test
Furnace：E410P- Sample：W10×L50×t1 (mm)
- Atmosphere：Air
- Material：SUS plate
VHT type
Maximum heat speed test using a ultra-high temperature furnace
Furnace：VHT-E68- Sample：Φ12×L30 (mm)
- Atmosphere：During N2 flow
- Material：Carbon
P type
Maximum heat speed test
Furnace：P610P- Sample：W20×L50×t0.8 (mm)
- Atmosphere：Air
- Material：SUS plate
Temperature uniformity test
Furnace：P610CN
Sample：W50×L100×t4 (mm)
Atmosphere：During N2 flow
Material：Carbon plate
Multi step heat test
Furnace：P610CN- Sample：W50×L80×t0.5 (mm)
- Atmosphere：During N2 flow
- Material：SUS plat
Cooling speed by gas type
Furnace：P610CP- Sample：W50×L80×t0.5 (mm)
- Material：SUS plate
- Flow rate：10 L/min
