SSA系列

アルバック販売

红外镀金聚焦炉和石英腔体构成的简易型设备。
由红外镀金聚焦炉及包含试料架的石英腔体构成的低价格的加热系统。

特点

Model	SSA-E45	SSA-E410	SSA-P610C
Heating Method	Focused light cylindrical heating		Parallel light cylindrical heating
Temperature Range	RT ～ 1400℃		RT ～ 1200℃
Heating zone	Φ15mm×L 50mm	Φ15mm×L 100mm	Φ50mm×L 100mm
Soaking zone	Φ10mm×L 40mm	Φ10mm×L 80mm	Φ40mm×L 80mm
Heating chamber	Quartz chamber Φ30（for gas flow）		Quartz chamber Φ98（for gas flow）
Sample holder	Quartz holder with boat shape		Quartz holder for 2-inch wafer
Thermocouple	JIS R-type
Temperature controller	TPC5000-32-1	TPC5000-62-1

※　Heating temperature changes according to the heated sample’s infrared reflectance, absorption, heat capacity, and material.

规格

Model	SSA-E45	SSA-E410	SSA-P610C
Heating Method	Focused light cylindrical heating		Parallel light cylindrical heating
Temperature Range	RT ～ 1400℃		RT ～ 1200℃
Heating zone	Φ15mm×L 50mm	Φ15mm×L 100mm	Φ50mm×L 100mm
Soaking zone	Φ10mm×L 40mm	Φ10mm×L 80mm	Φ40mm×L 80mm
Heating chamber	Quartz chamber Φ30（for gas flow）		Quartz chamber Φ98（for gas flow）
Sample holder	Quartz holder with boat shape		Quartz holder for 2-inch wafer
Thermocouple	JIS R-type
Temperature controller	TPC5000-32-1	TPC5000-62-1

※　Heating temperature changes according to the heated sample’s infrared reflectance, absorption, heat capacity, and material.