红外镀金聚焦炉/RTA装置
超高温灯退火设备
HT-RTA59HD
ULVAC EQUIPMENT SALES
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关于HT-RTA59HD的介绍、购买、商讨
特点
- 可在10秒内升至1800℃的超高温范围
- 椭圆形反射面上安装大功率灯的聚光灯
- Cold Wall结构可以快速加热/冷却和清洁加热
- 桌面型，加热炉，腔室，温度控制器一体化
- 通过连接了USB的PC可轻松输入温度程序
- 加热时的温度数据可以显示在计算机屏幕上（可以保存为文本文件）
用途
- SiC(GaN)功率器件工艺氧化膜形成和活化退火的研究开发
- 其他半导体的研究开发
- 玻璃基板、陶瓷、复合材料等的热处理
- 陶瓷材料的热冲击试验
- 各种热处理试验，如高熔点金属材料的烧结等
- 作为温度梯度炉
- 作为气体分析的加热炉
规格
| Temperature range | RT ～ 1800℃ |
|---|---|
| Sample dimension | square 15 × t1 (mm) |
| Heating atmosphere | Various gas flow |
| Thermocouple | JIS B Φ0.3 (W-Re is available) |
System diagram
1. For lamp cooling Air GAS INLET
2. GAS OUTLET
3. N2 GAS INLET
4. Ar GAS INLET
5. Lamp
6. Transparent quartz protective tube
7. Transparent quartz protective tube
8. Slider to move the sample into/out of the furnace (Manual operation)
Heating property
Maximum achieving temperature
The power supply : 7kW (max.)
Measurement : W-Re thermocouple
Heating atmosphere : N2 1L/min
Attainment Temperature : 2157℃（Approx 200℃/sec heating up to 2000℃）
Rapid heating control
Temperature recipe : 200℃/s holding time 5 min.
Heating atmosphere :N2 100cc/min
Sample holder : High purity carbon
Sample Susceptor : High purity carbon
Sample holder and susceptor
Utility
| Power requirements | AC 200V, single phase 8kW |
|---|---|
| Cooling water | 0.3MPa Approx 5L/min |
| Lamp cooling gas | Dry air Approx 200L/min |
| Outside dimensions (mm) | Approx W410 x D450 x H840 (excluding protrusion) |
| Weight | Approx 45kg |
Option
- Vacuum exhaust system (RP, DRY, TMP etc.)
- Gas piping system (From 2nd system)
- Cooling water circulator
- Cooling air generator system
- Handy spot welder (HS-9000)
- Handy arc welder (HA-1H)
