APS-1｜电弧等离子体蒸发源｜纳米粒子形成装置｜热处理・热物性评估装置｜产品中心

电弧等离子体蒸发源

APS-1

ULVAC EQUIPMENT SALES

同时蒸发不同的"蒸发材料"。
通过将本蒸发源增设在既存的电弧等离子法纳米粒子形成装置APD系列和手持式真空腔体中，可以同时蒸发不同的"蒸发材料"，生成具有新特性的材料。

特点

纳米颗粒的尺寸比传统的湿法更均匀，因此能够生产高活性催化剂
纳米颗粒尺寸约1.5nm至6nm可选
通过改变环境可以容易地产生氧化物和氮化物
如果有与ICF 070（VG 50）相当的法兰，无论那个方向都可以安装
无需水冷设备，方便维护

用途

多个蒸发源化合物的生成
添加到现有的真空室

规格

Target size	Φ 10mm × L 17 mm
Substrate size	Φ 2 inch (Φ 50 mm)
Deposition rate	0.01 nm/s ～ 0.3 nm/s ^*1
Film thickness uniformity	Fe:　< ± 10 %　(Φ 20 mm area) ^*1
Materials Available for deposition	Conductive materials ^*2

＊1 Distance from a target to a substrate: 80mm
＊2 Specific resistance of a target: 0.01Ωcm or less

Schematic of the Arc Plasma Source(APS)

Utility

System diagram

1. Condenser box：W110 x D320 x H200 (mm)
2. Body of APS within vacuum chamber：Φ34 x L200 (mm)
3. Power supply unit：W200 x D360 x H200 (mm)
4. Controller：W240 x D400 x H200 (mm)

※Put power supply unit & controller onto the rack.

TEM Images for Nano-Particles prepared by APS

（From left）

TEM image of Pt nano-particles supported on
Well-dispersed Pt nano-particles on the carbon powder are deposited.
TEM image of Pt nono-particles on a substrate
The size of nano-particle becomes larger as the pulse number of arc plasma shots is increased.
TEM image of Pt thin film
Extremely thin Pt film is formed by a stacking of nano-particles.

Photos of Deposition System installing APS

Example 1 : Sputtering system with APS

Example 2 : Arc Plasma Deposition system with one APS(APD-1P)

Table 1 Elements checked for deposition

Lanthanoid

Actinoid

Checked　　 Limited in use

纳米粒子形成装置 电弧等离子体蒸发源 APS-1

特点

用途

规格

Schematic of the Arc Plasma Source(APS)

Utility

System diagram

TEM Images for Nano-Particles prepared by APS

Photos of Deposition System installing APS

Table 1 Elements checked for deposition

特点

用途

规格

Schematic of the Arc Plasma Source(APS)

Utility

System diagram

TEM Images for Nano-Particles prepared by APS

Photos of Deposition System installing APS

Table 1 Elements checked for deposition

纳米粒子形成装置
电弧等离子体蒸发源 APS-1