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热电评估装置
热电特性评价装置
ZEM-5系列
アルバック販売
本系列对应各种热电材料的特性及薄膜等特殊规格。
针对各种材料的特点，比如高温、高电阻、薄膜等，是能满足各种需求的热电特性评价装置。
用途
- 半导体，陶瓷和金属等多种材料的热电特性评估
特点
- 适用于各种热电材料和薄膜等特殊规格
- 温度检测传感器采用C型热电偶，非常适合评估Si基热电材料（SiGe，MgSi等）（HT型）
- 标准配备V / I图，用于欧姆接触的自我诊断
- 可以测量高达1200℃（HT型）
- 支持高达10MΩ的高电阻（HR型）
- 能够测量沉积在基板上的材料（TF型）
- ‐温度控制可以在150℃至200℃之间（LT型）
专利和标准
- 热电JIS R 1650-1
- 抵抗力JIS R 1650-2
规格
| Model | ZEM-5HT | ZEM-5HR | ZEM-5LT | ZEM-5TF |
|---|---|---|---|---|
| Features | High temperature | High resistance | Low and middle temperature | Thin film |
| Temperature Range | 100℃～1200℃ | 100℃～800℃ | -150℃～200℃ | 50℃～500℃ |
| Sample Size | 2 to 4 mm square or Φ2 to 4 mm x 3 to 15 mm length | Deposited substrate:2 to 4 mm width x 0.4 to 1.2 mm thickness mm x 20 mm length Thin film thickness: nm scale or thicker *An insulation layer is required between the sample film and the substrate |
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| Thermocouple | C | R | K | R |
| Measurement accuracy | Seebeck coefficient: ±7% Electric resistivity: ±7% (less than 5mm long sample is not eligible.) |
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Constitution
- Sample measurement, control and measurement assy. 1 set
- Data acquisition. 1 set
- Atmosphere controller. 1 set
Utility(HT type)
| Power | Main body AC200V, 40A 1 location PC AC100V, 10A 2 locations |
|---|---|
| Cooling water | Water pressure 0.15 MPa Flow rate 5L/min |
| Atmosphere gas | Low pressure He gas 0.2 MPa (Low pressure and static atmosphere) |
| Space requirement | Approx.750mmW × 900mmD (Installed on table) |
Seebeck coefficient calculation method
Seebeck coefficient measurement shall be done by changing 3 temperature gradients and dividing dark electromotive force.
Setting and measurement screen
Temperature setting screen
V/I plot screen
