打印・
保存产品手册
保存产品手册
低温泵
压缩机单元
C30PMVRT
アルバック・クライオ
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Standard specification
| Voltage（ACV×Φ×Hz） | 200×3×50 220×3×60 |
| Power KW（50/60Hz） | 5.2/6.5 |
| Cooling method Water flow rate（L/min）(20℃) | Water cool 5.5 |
| Weight（Kg） | 121 |
*Adsorber replacement cycle：24,000 hours
*Multi specification
*Cooling water inlet/outlet Rc 3/8
Dimensions (mm)
