低温泵
压缩机单元
C30PMVRT
アルバック・クライオ
This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.
Standard specification
Voltage(ACV×Φ×Hz) | 200×3×50 220×3×60 |
Power KW(50/60Hz) | 5.2/6.5 |
Cooling method Water flow rate(L/min)(20℃) | Water cool 5.5 |
Weight(Kg) | 121 |
*Adsorber replacement cycle:24,000 hours
*Multi specification
*Cooling water inlet/outlet Rc 3/8