低温泵

压缩机单元

C30PMVRT

アルバック・クライオ

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

Standard specification

Voltage(ACV×Φ×Hz) 200×3×50
220×3×60
Power KW(50/60Hz) 5.2/6.5
Cooling method Water flow rate(L/min)(20℃) Water cool
5.5
Weight(Kg) 121

*Adsorber replacement cycle:24,000 hours
*Multi specification
*Cooling water inlet/outlet Rc 3/8

Dimensions (mm)

c30pmvrt-d_e.gif

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