溅射离子泵

PST系列用控制器

GST-07L-B

アルバック

GST-07L-B是一种溅射离子泵控制器,功能完善,可靠性高。它是ULVAC丰富的技术储备和在超高真空领域久经考验的长期积累的产物。

特点

  • 小型・轻量
    搭载CPU实现多功能化。
    单个装置可以控制所有离子溅射泵(PST系列)。
  • 通讯设备标准配件
    外部通信控制功能是标准配置,因此可以进行远程控制和自动操作。
  • XHV対応
    自动启动电路和软件启动功能可最大限度地减少泵电池的污染 (→专利1340297和其他申请待定)
  • 安全功能改进
    具有操作开关的防错功能和各种保护的互锁功能。 采用高氟橡胶树脂高压电缆,具有优异的耐热性,耐寒性和电气特性。
    限制使用指定的有害物质(RoHS指令)。
    符合CE标志

用途

  • 加速器
  • 电子显微镜
  • 分析机器

规格

Attachable pump Actor pump (all models in PST series)
Operating pressure 10-2 to 10-4Pa or lower
Display ranges Display method Digital display (on 7-segment LEDs)
Display contents
a)Output current display Automatic selection of 2 ranges: mA, μA (linear display)
b)Output voltage display 0.0 to 7.5 kV (H or L) (1-range linear display)
c)Pressure display Pa, mbr
(1×10-8~1×10-2Pa)
(1×10-10~1×10-4mbar)
Output release voltage DC+7.5kV
(2points, high and low, selectable using front panel switch; high/low voltage setting adjustable from approx.1.0 to 7.5kV using trimmer)
Output current Less than DC31mA
Input voltage/current AC100~115V±10% ・ 50/60Hz~3.0A
AC200~240V±10% ・ 50/60Hz~1.5A
MONITOR terminal output signal Output of signals proportionate to 7-segment panel display,DC 0 to 10V full scale for each range, more than 100kΩ
Pressure setting point 2 points
REMOTE/LOCAL Selectable using from panel switch
External control functions Various input/output functions provided (REMOTE connector provided) (Remote, RS-232C communication control)
Protection functions Error display/various protection functions provided
High voltage(HV) output shutdown ERR 0 to 5 light
Timer setting for startup protection (adjustable from 1 to 255 minutes) Automatic reserving after power failure (HV hold switch operation)
Ambient operating conditions Temperature 0~40℃
Humidity Less than 85% (no dew)
Accessories Output cable (5m), input cable (3m)
Weight Main unit: approx. 4kg, cables: approx. 1.0kg (standard)
Dimensions W x H x D 240 x 99 x 370 mm {200 x 99 x 370 mm (Except rack mounting bracket)}

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