涡轮分子泵

UTMーB 系列

UTM300B

アルバック

采用陶瓷轴承的复合翼型涡轮分子泵。通过泵的本体和控制器一体化,实现了省空间。出色的高背压特性使辅助泵的小型化成为可能。

特点

  • 安装方向自由
    安装方向没有限制,扩展了设备设计的自由度。
  • 搭载控制器
    控制器安装在主体上,有效地减少了布线并减小了排气系统的尺寸。
  • 高压缩比・高排气圧力
    高压缩比和高背压操作使得辅助泵可以实现小型化。
  • 三种法兰可供选择
    VG100、ICF152、ISO100-K三种类型的吸气口法兰可供选择。
  • 清洁真空
    在运行时以及泵停止时,碳氢化合物的回流很少。
  • 低噪音
    空载运行时的噪声在50 dB或更低。(ISO-100法兰的测量值)
  • 符合标准
    CE、NRTL

用途

  • 分析设备、研究开发设备、实验设备等的主排气系统
  • 蒸发设备、溅射设备等著排气系统
  • H2、He等轻气体主排气系统

规格

Model
UTM300B
Cooling method Natural air cooling Forced air cooling(fan)
Inlet Flange *1 VG100, ICF152, ISO100-K
Outlet Flange KF16
Pumping speed (without a protection screen)
N2
280 L/s
He
270 L/s
H2
220 L/s
Ultimate pressure (With 2stage back pump)
After baking
*2 10-8Pa
Before baking
10-6Pa 10-6Pa
Max. compression rate N2 : >1×109, He : 7×106, H2 : 1×105
Max. pressure at inlet of N2 *3, *4, *5
N2
0.06Pa 0.7Pa
Max. pressure at outlet of N2 *3, *4, *6
N2
100Pa 1000Pa
Continuous running maximum flow *7
when 120L/m backing pump is used
Without gas purge
N2
10sccm 100sccm
Without gas purge
Ar
- 30sccm
With gas purge
- 40sccm
Recommend backing pump (when evacuating 10SCCM) *8 >120L/min
Weight
VG, ISO / ICF
6kg / 9kg 6.3kg / 9.3kg
Rotation speed 60000rpm
Start-up time (Up to 80) (DC24V. Back pressure: 5Pa or less). 3.5 min
Surface treatment *9 None
Mounting direction All direction
Noise *10 <50dB(A)
Standard accessories Each of instruction Manua (l English and Japanese), protection screen (for VG and ICF. Cap of ISO Flange is built into the gasket), gasket (for Inlet), dust cap (or Inlet, outlet and connector).

*1 Inlet flange is from VG100, ICF152 and ISO100-K when ordering.
*2 Baking is available only for forced air cooling type with ICF flange.
*3 Value at the time of the ambient air temperature is 25ºC. If ambient air temperature changes, an acceptable value will change.
*4 Maximum outlet pressure and maximum inlet pressure can not be satisfied at the same time.
*5 Maximum inlet port pressure which can accept continuous running.
*6 Maximum pressure at exhaust port which can accept continuous running when gas flow coming from inlet port is 0 mL/min.
*7 Value when ambient temperature is 5~25ºC. In addition, N2 should be used for gas purge and its flow rate should be 0.4mbarL/sec(25sccm).
*8 Select appropriate backing pump not to maintain exhaust port pressure less than maximum exhaust port pressure when gas flow increases.
*9 Do not flow reactive gas, corrosive gas, and gas includes Gallium. Please contact us when using other gases.
*10 This value is measured by ULVAC standard for ISO flange type.

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