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涡轮分子泵

UTMーB 系列

UTM70B

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采用陶瓷轴承的复合翼型涡轮分子泵。通过泵的本体和控制器一体化,实现了省空间。出色的高背压特性使辅助泵的小型化成为可能。

特点

  • 安装方向自由
    安装方向没有限制,扩展了设备设计的自由度。
  • 搭载控制器
    控制器安装在主体上,有效地减少了布线并减小了排气系统的尺寸。
  • 高压缩比・高排气圧力
    高压缩比和高背压操作使得辅助泵可以实现小型化。
  • 三种法兰可供选择
    VG65、ICF114、ISO63-K三种类型的吸气口法兰可供选择。
  • 清洁真空
    在运行时以及泵停止时,碳氢化合物的回流很少。
  • 低噪音
    空载运行时的噪声在48 dB或更低。
    (ISO63-K法兰的测量值)

用途

  • 分析设备、研究开发设备、实验设备等的主排气系统
  • 蒸发设备、溅射设备等著排气系统
  • H2、He等轻气体主排气系统

规格

Model
UTM70B
Pump
Cooling method Natural air cooling Forced air cooling(fan)
Inlet Flange *1 VG65, ICF114, ISO063-K
Outlet Flange KF16
Pumping speed(without a protective net )
N2
70 L/s
He
60 L/s
H2
49 L/s
Ultimate pressure(With 2stage back pump)*2,*3
After baking
- 10-8Pa/10-10Torr(mbar)
Before baking
10-6Pa/10-8Torr(mbar)
Max. compression rate N2 : >1×109, He : 4×107, H2 : 4×105
Max. pressure at inlet *4, *5, *6
N2
0.43Pa/3×10-3Torr/43mbar 1.1Pa/8×10-3Torr/110mbar
Max. pressure at outlet *4, *5, *7
N2
300Pa/2.3torr/3×104mbar 900Pa/6.8Torr/9×104mbar
Continuous running maximum flow *8
When 60L.min backing pump is used
Without gas purge
N2
15sccm 40sccm
Without gas purge
Ar
- 10sccm
With gas purge
- 15sccm
Recommend backing pump(when evacuating 10SCCM)*9 >60L/min
Weight*10 VG:3.3kg, ISF:3.0kg, ISO:5.0kg
Rotation speed 87000rpm
Start-up time(Up to 80%)(DC24V. Back pressure:5Pa or less) 1.7分
Surface treatment *11 None
Mounting direction All direction
Noise *12 <48dB(A)
Controller
Input power source DC24V ±5%, 120W
Contact input and output signal REMOTE(D-sub 15 pin male)
Digital input:4 points.Output:4 points.Analog output:1 point.
Serial communication RS-485(D-sub 15 pin male, Shared with REMOTE)
LED Display POWER,NORMAL,ALARM
Switch START/STOP,RESET
Variable rotational frequency/ speed Change of operation rotation speed number is possible between 25%
and 100% from the pump spec by 0.1% step.
Abnormal operation detection Detecting alarm and warning.
Protection circuit Indicating alarm and warning.
Standard accessories

Instruction Manual(CD-R), Protective net(Only VG and ICF.
In ISO flange protective net is built in the gasket.),Gasket(inlet flange),
Dust cap(for inlet, outlet and connector)

*1 Inlet flenge is from VG65,ICF114 and ISO63-K when ordering.
*2 A digit number is expressed.
*3 Baking is available only for forced air cooling type with ICF flange.
*4 Value at the time of the ambient air temperature is 25℃. If ambient air temperature changes, an acceptable value will change.
*5 Maximum outlet pressure and maximum inlet pressure can not be satisfied at the same time.
*6 Maximum inlet port pressure which can accept continuous running.
*7 Maximum pressure at exhaust port which can accept continuous running when gas flow coming from inlet port is 0 sccm.
*8 Value when ambient temperature is 5~25℃. In addition, N2 should be used for gas purge and its flow rate should be 25 sccm.
*9 Select appropriate backing pump not to maintain exhaust port pressure less than maximum exhaust port pressure when gas flow increases.
*10 Cooling Fan makes UTM70B 0.2kg heavier.
*11 Do not flow reactive gas, corrosive gas, and gas includes Gallium. Please contact us when using other gases.
*12 This value is measured by ULVAC standard for ISO flange type.

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