涡轮分子泵
UTMーB 系列
UTM70B
アルバック
采用陶瓷轴承的复合翼型涡轮分子泵。通过泵的本体和控制器一体化,实现了省空间。出色的高背压特性使辅助泵的小型化成为可能。
特点
- 安装方向自由
安装方向没有限制,扩展了设备设计的自由度。 - 搭载控制器
控制器安装在主体上,有效地减少了布线并减小了排气系统的尺寸。 - 高压缩比・高排气圧力
高压缩比和高背压操作使得辅助泵可以实现小型化。 - 三种法兰可供选择
VG65、ICF114、ISO63-K三种类型的吸气口法兰可供选择。 - 清洁真空
在运行时以及泵停止时,碳氢化合物的回流很少。 - 低噪音
空载运行时的噪声在48 dB或更低。
(ISO63-K法兰的测量值)
用途
- 分析设备、研究开发设备、实验设备等的主排气系统
- 蒸发设备、溅射设备等著排气系统
- H2、He等轻气体主排气系统
规格
Model
|
UTM70B | ||||
Pump | |||||
Cooling method | Natural air cooling | Forced air cooling(fan) | |||
Inlet Flange *1 | VG65, ICF114, ISO063-K | ||||
Outlet Flange | KF16 | ||||
Pumping speed(without a protective net ) |
N2
|
70 L/s | |||
He
|
60 L/s | ||||
H2
|
49 L/s | ||||
Ultimate pressure(With 2stage back pump)*2,*3 |
After baking
|
- | 10-8Pa/10-10Torr(mbar) | ||
Before baking
|
10-6Pa/10-8Torr(mbar) | ||||
Max. compression rate | N2 : >1×109, He : 4×107, H2 : 4×105 | ||||
Max. pressure at inlet *4, *5, *6 |
N2
|
0.43Pa/3×10-3Torr/43mbar | 1.1Pa/8×10-3Torr/110mbar | ||
Max. pressure at outlet *4, *5, *7 |
N2
|
300Pa/2.3torr/3×104mbar | 900Pa/6.8Torr/9×104mbar | ||
Continuous running maximum flow *8 When 60L.min backing pump is used |
Without gas purge
|
N2
|
15sccm | 40sccm | |
Without gas purge
|
Ar
|
- | 10sccm | ||
With gas purge
|
- | 15sccm | |||
Recommend backing pump(when evacuating 10SCCM)*9 | >60L/min | ||||
Weight*10 | VG:3.3kg, ISF:3.0kg, ISO:5.0kg | ||||
Rotation speed | 87000rpm | ||||
Start-up time(Up to 80%)(DC24V. Back pressure:5Pa or less) | 1.7分 | ||||
Surface treatment *11 | None | ||||
Mounting direction | All direction | ||||
Noise *12 | <48dB(A) | ||||
Controller | |||||
Input power source | DC24V ±5%, 120W | ||||
Contact input and output signal | REMOTE(D-sub 15 pin male) Digital input:4 points.Output:4 points.Analog output:1 point. |
||||
Serial communication | RS-485(D-sub 15 pin male, Shared with REMOTE) | ||||
LED Display | POWER,NORMAL,ALARM | ||||
Switch | START/STOP,RESET | ||||
Variable rotational frequency/ speed | Change of operation rotation speed number is possible between 25% and 100% from the pump spec by 0.1% step. |
||||
Abnormal operation detection | Detecting alarm and warning. | ||||
Protection circuit | Indicating alarm and warning. | ||||
Standard accessories |
Instruction Manual(CD-R), Protective net(Only VG and ICF. |
*1 | Inlet flenge is from VG65,ICF114 and ISO63-K when ordering. |
*2 | A digit number is expressed. |
*3 | Baking is available only for forced air cooling type with ICF flange. |
*4 | Value at the time of the ambient air temperature is 25℃. If ambient air temperature changes, an acceptable value will change. |
*5 | Maximum outlet pressure and maximum inlet pressure can not be satisfied at the same time. |
*6 | Maximum inlet port pressure which can accept continuous running. |
*7 | Maximum pressure at exhaust port which can accept continuous running when gas flow coming from inlet port is 0 sccm. |
*8 | Value when ambient temperature is 5~25℃. In addition, N2 should be used for gas purge and its flow rate should be 25 sccm. |
*9 | Select appropriate backing pump not to maintain exhaust port pressure less than maximum exhaust port pressure when gas flow increases. |
*10 | Cooling Fan makes UTM70B 0.2kg heavier. |
*11 | Do not flow reactive gas, corrosive gas, and gas includes Gallium. Please contact us when using other gases. |
*12 | This value is measured by ULVAC standard for ISO flange type. |