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涡轮分子泵
UTMｰMS 系列
UTM-MS
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涡轮分子泵，带有使用磁悬浮轴承的独立控制器。我们有抽速为300~4000 L/s 的型号阵容。控制器单元可以监控运行状态并支持各种通信标准。
特点
- 泵体和控制器分开。控制器可以监控运行状态并支持各种通信标准。
- 自由的安装方向。自由的安装方向使系统装置的设计更灵活。
- 排气速度300L/s～4000L/s的型号阵容。
- 分子泵转速在25-100%范围内可变。通过改变转速在腔室中实现压力调节。
- 高耐用性和安全性。通过了大气冲击试验、急停测试等各种安全性确认试验。
用途
- 各种设备的主真空排气系统
- 半导体制造设备
- 蒸镀设备
- 溅射设备
- 研究开发设备
- 分析设备、实验装置等 - 主真空泵系统，用于不产生副反应生成物的轻工艺产线的真空系统。
- 其他的高真空排气系统。
规格
Table 1
*1：digit number is expressed.
*2：Without a protective net.
*3：Max inlet pressure and Max outlet pressure cannot be satisfied at same time.
| Model | UTM300A-MS | UTM400A-MS | UTM800A-MS | UTM1000A-MS | ||||||
| Inlet port | VG100 / ICF152 | VG150 / ICF203 | VG200 / ICF253 | |||||||
| Outlet port | KF25 | KF40 | ||||||||
| Cooling method | Water cooling |
Air cooling |
Water cooling |
Air cooling |
Water cooling |
Air cooling |
Water cooling |
Air cooling |
||
| Ultimate pressure *1 | Pa | 10-7 | 10-8 | |||||||
| Pumping speed *2 | N2 | L/s | 320 | 420 | 800 | 1080 | ||||
| Ar | L/s | ー | ||||||||
| He | L/s | 340 | 360 | 800 | 930 | |||||
| H2 | L/s | 320 | 340 | 700 | 790 | |||||
| Compression rate | N2 | 1×109 | ||||||||
| He | 8×104 | |||||||||
| H2 | 1×104 | 4×103 | ||||||||
| Max inlet pressure *3 | Pa | 200 | 1.3 | 200 | 1.3 | 400 | 1.3 | 400 | 1.3 | |
| Max outlet pressure *3 | Pa | 400 | 40 | 400 | 40 | 665 | 40 | 665 | 40 | |
| Rotation speed | rpm | 45000 | 35000 | |||||||
| Start-up time | 5minutes or less | |||||||||
| Mounting position | In any desired direction | |||||||||
| Surface treatment | Nickel plating | |||||||||
| Cooling water | Flow rate | L/min | 1～3 | ー | 1～3 | ー | 1～3 | ー | 1～3 | ー |
| Pressure | MPaG | 02～0.5 | ー | 02～0.5 | ー | 02～0.5 | ー | 02～0.5 | ー | |
| Noise | dB(A) | 60 | ||||||||
| Weight | kg | 14 | 33 | 32 | ||||||
| Recommended backing pump | 200L/minor more | 500L/minor more | ||||||||
| Controller | Composition | Separate type | ||||||||
| Input electric power | Single phase AC200 〜240V ±10%（ 50/60Hz ±2Hz） | |||||||||
| Max power | 0.55 | 1.0 | ||||||||
| Speed variation | Speed is variable between 25% and 100% of the rated speed.（ set as 0.1%） | |||||||||
| Communication | Contact | |||||||||
| Serial：RS-232C / RS-485 | ||||||||||
| Weight | kg | 8 | ||||||||
*2：Without a protective net.
*3：Max inlet pressure and Max outlet pressure cannot be satisfied at same time.
Table 2
| Model | UTM1300A-MS | UTM1500A-MS | UTM2400A-MS | UTM3400A-MS | UTM4300A-MS | ||
| Inlet port | VG200 / ICF253 | VG250 | VG300 / VG350 | VG350 | |||
| Outlet port | KF40 | ||||||
| Cooling method | Water cooling | ||||||
| Ultimate pressure *1 | Pa | 10-7 | |||||
| Pumping speed *2 | N2 | L/s | 1300 | 1500 | 2100 | 3200 | 4400 |
| Ar | L/s | ー | 2000 | 3100 | 4200 | ||
| He | L/s | 1050 | 1200 | 2240 | 3100 | ー | |
| H2 | L/s | 750 | 800 | 1770 | 2200 | 2600 | |
| Compression rate | N2 | 6×108 | 1×109 | ||||
| He | 1×104 | 7×104 | 1×105 | 3×104 | |||
| H2 | 1×103 | 3×103 | 6×103 | 2×103 | |||
| Max inlet pressure *3 | Pa | 133 | 40 | ||||
| Max outlet pressure *3 | Pa | 270 | 270 | ||||
| Rotation speed | rpm | 30300 | 27000 | 27600 | 24000 | ||
| Start-up time | 7minutes or less | 11minutes or less | 12minutes or less | 18minutes or less | |||
| Mounting position | In any desired direction | ||||||
| Surface treatment | Nickel plating | ||||||
| Cooling water | Flow rate | L/min | 1～3 | 2～4 | |||
| Pressure | MPaG | 02～0.5 | |||||
| Noise | dB(A) | 60 | 57 | 60 | |||
| Weight | kg | 39 | 42 | 70 | 84 | 105 | |
| Recommended backing pump | 600L/minor more | 1300L/minor more | 1500L/minor more | ||||
| Controller | Composition | Separate type | |||||
| Input electric power | Single phase AC200 〜240V ±10%（ 50/60Hz ±2Hz） | ||||||
| Max power | 1.0 | 1.5 | |||||
| Speed variation | Speed is variable between 25% and 100% of the rated speed.（ set as 0.1%） | ||||||
| Communication | Contact | ||||||
| Serial：RS-232C / RS-485 | |||||||
| Weight | kg | 8 | |||||
*1：digit number is expressed.
*2：Without a protective net.
*3：Max inlet pressure and Max outlet pressure cannot be satisfied at same time.
