RF电源 / 匹配切换机
RFS-N 系列
RFS-1305N
ULVAC
RFS-N系列是输出频率13.56MHz、功率0.5kW/1/kW/3kW/5kW的等离子工艺用RF电源。
装载高效率RF放大器实现了小型·轻量化。
另外，RF电源内置自动匹配控制器功能，仅从主机单元就可以对RF电源进行电力控制及匹配系统控制。
特点
- 高效率
配有高功率转换效率的RF电路以节省能量。 - 快速自动匹配
快速算法实现快速自动匹配。 - RF电源内置自动匹配功能
只有主机才能进行匹配系统控制。
可通过内置控制器手动控制RF电源和匹配器 - 灵活的控制
外部模拟控制，可实现串联通信控制。 - 可靠性高
对作为设备制造商所积累的设计经验。
用途
- 溅射设备
- CVD设备
- 等离子蚀刻设备
- RF离子源
- 中和剂
规格
[Power generator]
| Model | RFS-1305N | RFS-1310N | RFS-1330N | RFS-1350N | |
| Input Spec | Input rated voltage | AC200 to 220V | |||
| Input voltage fluctuation range | AC180～242V | ||||
| Phase, frequency | 1phase 50/60Hz | 3phase 50/60Hz | |||
| Input connector | Bayonet netlock round connector DCA3102E16-10P-D |
Bayonet netlock round connector DCA3102E22-22P-D |
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| Input capacity | 1.2 kVA or less | 1.8 kVA or less | 5 kVA以 or less | 8 kVA or less | |
| Input current | 10A or less | 25A or less | 30A or less | ||
| Leak current | 5mA or less | ||||
| Output Spec | Oscillating frequency | 13.56MHz | |||
| Rated traveling-wave power | 500W（50Ω load） | 1000W（50Ω load） | 3000W（50Ω load） | 5000W（50Ω load） | |
| Maximum reflected wave power | 100W | 500W | |||
| Output impedance | 50Ω | ||||
| Harmonic distortion ratio | -35dB or less (Rated output, Continuous mode) | ||||
| Output connector | N type | HN type | DIN 7/16 | ||
| Cont | Control method | Power control mode | |||
| Control precision | Rated output ±2％ or less（Rated power 10～100％） | ||||
| Cooling method | Air-cooling | Water-cooling | |||
| No cooling water required | Flow rate 4L/min | Flow rate 6L/min | |||
| Control guarantee range | Rated power 10 to 100％ | ||||
| Demensions W x D x H | 240mm x 495mm x 150mm （excepting projection portion) |
480mm × 500mm × 150mm （excepting projection portion) |
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| Weight | 11kg | 23kg | |||
[Matching box]
| Model | MBX-1305N | MBX-1310N | MBX-1330N | MBX-1350N | |
| RF input | Input frequency | 13.56MHz | |||
| Rated power | 30～500W | 30～1000W | 30～3000W | 50～5000W | |
| Input connector | N type | HN type | DIN 7/16 type | ||
| RF output | Allowable output voltage | 2.5kVpp or less / 2.5kVdc or less | 5.0kVpp or less / 2.5kVdc or less | 10kVpp or less / 2.5kVdc or less | |
| Allowable output current | 30A or less | 80A or less | 120A or less | ||
| Load impedance | Real part： 0.5Ω ≦ R ≦ 10.0Ω （Only the range of regulation voltage and current） |
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| Residual reflected wave power | Big either input travelling wave power 0.3％ or less or 10W or less | Big either input travelling wave power 0.3％ or less or 30W or less | Big either input travelling wave power 0.3％ or less or 50W or less | ||
| Cooling system | Air-cooling | Air-cooling + Water-cooling （Flow rate 2L/min） | |||
| Demensions W x D x H | 375mm x 250mm x 120mm（excepting projection portion） | 375mm x 250mm x 170mm （excepting projection portion） |
450mm x 500mm x 248mm （excepting projection portion） |
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| Weight | Approx. 8kg | Approx. 10kg | Approx. 21kg | ||
* Operating ambient temperature 10 to 40℃ (non condensing)
* Operating environment, direct sunlight, heat、dust, avoid a vibration, do not contain corrosive gas
