RFS-1330N

アルバック

RFS-N系列是输出频率13.56MHz、功率0.5kW/1/kW/3kW/5kW的等离子工艺用RF电源。装载高效率RF放大器实现了小型·轻量化。另外，RF电源内置自动匹配控制器功能，仅从主机单元就可以对RF电源进行电力控制及匹配系统控制。

特点

高效率
配有高功率转换效率的RF电路以节省能量。
快速自动匹配
快速算法实现快速自动匹配。
RF电源内置自动匹配功能
只有主机才能进行匹配系统控制。
可通过内置控制器手动控制RF电源和匹配器
灵活的控制
外部模拟控制，可实现串联通信控制。
可靠性高
对作为设备制造商所积累的设计经验。

用途

溅射设备
CVD设备
等离子蚀刻设备
RF离子源
中和剂

规格

[Power generator]

Model		RFS-1305N	RFS-1310N	RFS-1330N	RFS-1350N
Input Spec	Input rated voltage	AC200 to 220V
	Input voltage fluctuation range	AC180～242V
	Phase, frequency	1phase　50/60Hz		3phase　50/60Hz
	Input connector	Bayonet netlock round connector DCA3102E16-10P-D		Bayonet netlock round connector DCA3102E22-22P-D
	Input capacity	1.2 kVA or less	1.8 kVA or less	5 kVA以 or less	8 kVA or less
	Input current	10A or less		25A or less	30A or less
	Leak current	5mA or less
Output Spec	Oscillating frequency	13.56MHz
	Rated traveling-wave power	500W（50Ω load）	1000W（50Ω load）	3000W（50Ω load）	5000W（50Ω load）
	Maximum reflected wave power	100W		500W
	Output impedance	50Ω
	Harmonic distortion ratio	-35dB or less (Rated output, Continuous mode)
	Output connector	N type		HN type	DIN 7/16
Cont	Control method	Power control mode
	Control precision	Rated output ±2％ or less（Rated power 10～100％）
Cooling method		Air-cooling		Water-cooling
		No cooling water required		Flow rate 4L/min	Flow rate 6L/min
Control guarantee range		Rated power 10 to 100％
Demensions W x D x H		240mm x 495mm x 150mm （excepting projection portion)		480mm × 500mm × 150mm （excepting projection portion)
Weight		11kg		23kg

[Matching box]

Model		MBX-1305N	MBX-1310N	MBX-1330N	MBX-1350N
RF input	Input frequency	13.56MHz
	Rated power	30～500W	30～1000W	30～3000W	50～5000W
	Input connector	N type		HN type	DIN 7/16 type
RF output	Allowable output voltage	2.5kVpp or less / 2.5kVdc or less		5.0kVpp or less / 2.5kVdc or less	10kVpp or less / 2.5kVdc or less
	Allowable output current	30A or less		80A or less	120A or less
	Load impedance	Real part： 0.5Ω ≦ R ≦ 10.0Ω （Only the range of regulation voltage and current）
Residual reflected wave power		Big either input travelling wave power 0.3％ or less or 10W or less		Big either input travelling wave power 0.3％ or less or 30W or less	Big either input travelling wave power 0.3％ or less or 50W or less
Cooling system		Air-cooling		Air-cooling + Water-cooling （Flow rate 2L/min）
Demensions W x D x H		375mm x 250mm x 120mm（excepting projection portion）		375mm x 250mm x 170mm （excepting projection portion）	450mm x 500mm x 248mm （excepting projection portion）
Weight		Approx. 8kg		Approx. 10kg	Approx. 21kg

* Operating ambient temperature 10 to 40℃ (non condensing)
* Operating environment, direct sunlight, heat、dust, avoid a vibration, do not contain corrosive gas

該非判定結果報告書 Download

SDS Download

可选部件・消耗品

特点

高效率
配有高功率转换效率的RF电路以节省能量。

快速自动匹配
快速算法实现快速自动匹配。

RF电源内置自动匹配功能
只有主机才能进行匹配系统控制。
可通过内置控制器手动控制RF电源和匹配器

灵活的控制
外部模拟控制，可实现串联通信控制。

可靠性高
对作为设备制造商所积累的设计经验。

规格

[Power generator]

Model		RFS-1305N	RFS-1310N	RFS-1330N	RFS-1350N
Input Spec	Input rated voltage	AC200 to 220V
	Input voltage fluctuation range	AC180～242V
	Phase, frequency	1phase　50/60Hz		3phase　50/60Hz
	Input connector	Bayonet netlock round connector DCA3102E16-10P-D		Bayonet netlock round connector DCA3102E22-22P-D
	Input capacity	1.2 kVA or less	1.8 kVA or less	5 kVA以 or less	8 kVA or less
	Input current	10A or less		25A or less	30A or less
	Leak current	5mA or less
Output Spec	Oscillating frequency	13.56MHz
	Rated traveling-wave power	500W（50Ω load）	1000W（50Ω load）	3000W（50Ω load）	5000W（50Ω load）
	Maximum reflected wave power	100W		500W
	Output impedance	50Ω
	Harmonic distortion ratio	-35dB or less (Rated output, Continuous mode)
	Output connector	N type		HN type	DIN 7/16
Cont	Control method	Power control mode
	Control precision	Rated output ±2％ or less（Rated power 10～100％）
Cooling method		Air-cooling		Water-cooling
		No cooling water required		Flow rate 4L/min	Flow rate 6L/min
Control guarantee range		Rated power 10 to 100％
Demensions W x D x H		240mm x 495mm x 150mm （excepting projection portion)		480mm × 500mm × 150mm （excepting projection portion)
Weight		11kg		23kg

[Matching box]

Model		MBX-1305N	MBX-1310N	MBX-1330N	MBX-1350N
RF input	Input frequency	13.56MHz
	Rated power	30～500W	30～1000W	30～3000W	50～5000W
	Input connector	N type		HN type	DIN 7/16 type
RF output	Allowable output voltage	2.5kVpp or less / 2.5kVdc or less		5.0kVpp or less / 2.5kVdc or less	10kVpp or less / 2.5kVdc or less
	Allowable output current	30A or less		80A or less	120A or less
	Load impedance	Real part： 0.5Ω ≦ R ≦ 10.0Ω （Only the range of regulation voltage and current）
Residual reflected wave power		Big either input travelling wave power 0.3％ or less or 10W or less		Big either input travelling wave power 0.3％ or less or 30W or less	Big either input travelling wave power 0.3％ or less or 50W or less
Cooling system		Air-cooling		Air-cooling + Water-cooling （Flow rate 2L/min）
Demensions W x D x H		375mm x 250mm x 120mm（excepting projection portion）		375mm x 250mm x 170mm （excepting projection portion）	450mm x 500mm x 248mm （excepting projection portion）
Weight		Approx. 8kg		Approx. 10kg	Approx. 21kg

* Operating ambient temperature 10 to 40℃ (non condensing)
* Operating environment, direct sunlight, heat、dust, avoid a vibration, do not contain corrosive gas