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真空搬送机器人
ELEC/COVOT 系列
COVOT-LC
ULVAC
COVOT-LC没有Z軸、是简单又合理的真空搬送机械手。
特点
- 没有Z軸，简单的双轴机器人
- 控制器内置，可以实现紧凑的设备布局。
- 支持10 -5 Pa的高真空。
用途
- 半导体设备的自动晶片搬送
- 各种真空实验设备的基板搬送
规格
| Pressure range | to 10-5Pa | |
| Wafer size | 200mm/300mm | |
| Number of wafer | 1 or 2 | |
| Maximum distance * | 880mm | |
| Rotation | -15° to 375° | |
| Z-axis stroke | - | |
| Minimum rotation diameter * | 802mm | |
| Weight capacity (hand is included) | 1kg | |
| Speed | R | Max 2.5sec / full stroke |
| Θ | Max 2.5sec / 180° | |
| Z | - | |
| Position Accuracy | R | ±0.2mm |
| Θ | ±0.2mm | |
| Z | - | |
| Teaching pendant | Option | |
| Controller | Built-in type | |
*Changes by the arm and hand.
