陶瓷隔膜真空计
CCMT-D 系列
CCMT-1000D
アルバック
传感器部由陶瓷一体构造,具备优秀的再现性、稳定性,在低·中真空领域不受气体的种类影响(可以测量绝对压力),能够高精度地测量。
特点
- 长期稳定
- 使用陶瓷膜,具有优异的耐腐蚀性
- 内置式温度补偿回路
- 采用新结构保护传感器免受污垢
- 可以通过按钮进行零点调整
用途
- 用于成膜设备工艺中的压力监控
- 用于真空溶解、真空热处理炉等真空排气系统的压力监控
- 用于太阳能电池等各种制造设备的压力监控
规格
Model | CCMT-D | ||
Range full scale | CCMT-1000D | 133kPa (1×103 Torr, 1.33×103 mbar) F.S. | |
CCMT-100D | 13.3kPa (1×102 Torr, 1.33×102 mbar) F.S. | ||
CCMT-10D | 1.33kPa (10 Torr, 13.3 mbar) F.S. | ||
CCMT-1D | 133Pa (1 Torr, 1.33 mbar) F.S. | ||
Resolution | 0.003% of full scale | ||
Accuracy *1 | ±0.2%±temperature coefficient relative to display value (The value indicates accuracy zero point adjustment) | ||
Temperature coefficient | Zero voltage | 0.015% F.S. / ℃ | |
Span voltage | 0.01% R / ℃ | ||
Operating temperature range | 10 to 50℃ (50 to 122 °F) | ||
Response rate | 30ms or less | ||
Material of gas contacting sections | Al2O3、Vacon70 *2、SUS316 *3 , glass ceramics solder, Ag Ti Cu hard solder | ||
Input power | DC14~30V, 1W | ||
Output | DC 0 to 10V F.S. | ||
weight | 329g | ||
Dimensions | 55mm×117mm | ||
Temperature compensation | Internal temperature compensation circuit | ||
Electrical connector | D-sub 15-pin male (No.4-40, DNC screw) |
*1 : Non-linearity,hysteresis,repeatability at 25℃ (77℉) ambient operating temperature without tenperature effects after 2 hours operation, after zero sdjustment
*2 : 28% Ni, 23% Co, 49% Fe
*3 : 18% Cr, 10% Ni, 3% Mo, 69% Fe