陶瓷隔膜真空计

CCMT-D 系列

CCMT-10D

アルバック

CCMT-D系列、陶瓷隔膜根据气体的压力变化发生变形、电容式真空计根据静电容量的变化检测压力。
传感器部由陶瓷一体构造,具备优秀的再现性、稳定性,在低·中真空领域不受气体的种类影响(可以测量绝对压力),能够高精度地测量。

特点

  • 长期稳定
  • 使用陶瓷膜,具有优异的耐腐蚀性
  • 内置式温度补偿回路
  • 采用新结构保护传感器免受污垢
  • 可以通过按钮进行零点调整

用途

  • 用于成膜设备工艺中的压力监控
  • 用于真空溶解、真空热处理炉等真空排气系统的压力监控
  • 用于太阳能电池等各种制造设备的压力监控

规格

Model CCMT-D
Range full scale CCMT-1000D 133kPa (1×103 Torr, 1.33×103 mbar) F.S.
CCMT-100D 13.3kPa (1×102 Torr, 1.33×102 mbar) F.S.
CCMT-10D 1.33kPa (10 Torr, 13.3 mbar) F.S.
CCMT-1D 133Pa (1 Torr, 1.33 mbar) F.S.
Resolution 0.003% of full scale
Accuracy *1 ±0.2%±temperature coefficient relative to display value (The value indicates accuracy zero point adjustment)
Temperature coefficient Zero voltage 0.005% F.S. /˚C
Span voltage 0.01% R /˚C
Operating temperature range 10 to 50˚C (50 to 122˚F)
Response rate 30ms or less
Material of gas contacting sections Al2O3、Vacon70 *2、SUS316 *3 , glass ceramics solder, Ag Ti Cu hard solder
Input power DC14~30V, 1W
Output DC 0 to 10V F.S.
weight 329g
Dimensions 55mm×117mm
Temperature compensation Internal temperature compensation circuit
Electrical connector D-sub 15-pin male (No.4-40, DNC screw)

*1:Non-linearity,hysteresis,repeatability at 25˚C (77˚C) ambient operating temperature without tenperature effects after 2 hours operation
*2:18% Cr, 10% Ni, 3% Mo, 69% Fe
*3:28% Ni, 23% Co, 49% Fe

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