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热阴极电离真空计

通用型

AxTRAN 系列

AxTRAN

アルバック

AxTRAN是在离子源和离子收集器之间配置了Bessel-Box型能量过滤器的热阴极电离真空计。
由于降低了软X射线,ESD离子等的残留电流,实现了0.5×10-10 Pa的测定分辨率。

特点

  • 可以测量10-11Pa
  • 可以减少诸如软X射线和ESD离子之类的剩余电流
  • 测量区域广1×10-2~0.5×10-10Pa
  • 标准配有压力0~10V模拟Log输出/每个数字内1V线性输出
  • 可以输出2个设定点
  • BCD/RS232C(可选)

用途

  • 用于真空设备,如高能加速器压力测量
  • 用于超高、极高真空设备的压力测量

规格

Model ISX2
Measurable pressure range 5×10-11 to 1×10-2 Pa (3.75×10-13 to 7.5×10-5 Torr, 5×10-13 to 1×10-4 mbar)
Measurement resolution 0.5×10-10 Pa (0.375×10-12 Torr, 0.5×10-12 mbar)
Display Digital indication, 3 digit mantissa, 2 digit exponent
DEGAS Electron stumilated desorption式
Measurement value output Linear output 0 to10 VDC
Pseudo-logarithmic output 0 to 10V (1V linear signal in each digit )
Set points 2 points
Operating temperature range 10 to 40˚C (50 to 104˚F)
Operating humidity range 15 to 80% (not condensing)
Power supply voltage AC85 to 240V
External dimensions W×D×H 240mm×350mm×99mm
Weight 5.3kg
Standard accessories AC100V (3P plug with ground) power cable, Manual
Option Sensor: X-11
Sensor cable: 5, 10, 20m
BCD output, RS232C/485

Compatible sensor head X-11
Energy filter Bessel-Box type
Filament Ir・Y2O3×2
Mount flange UFC-070
Max. baking temperature 300℃ (572˚F) without sensor cable

該非判定結果報告書 Download

SDS Download

可选部件・消耗品

热阴极电离真空计 通用型 AxTRAN 系列
测定子 X-11(ICF070)

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