热阴极电离真空计
通用型
AxTRAN 系列
AxTRAN
アルバック
AxTRAN是在离子源和离子收集器之间配置了Bessel-Box型能量过滤器的热阴极电离真空计。
由于降低了软X射线,ESD离子等的残留电流,实现了0.5×10-10 Pa的测定分辨率。
特点
- 可以测量10-11Pa
- 可以减少诸如软X射线和ESD离子之类的剩余电流
- 测量区域广1×10-2~0.5×10-10Pa
- 标准配有压力0~10V模拟Log输出/每个数字内1V线性输出
- 可以输出2个设定点
- BCD/RS232C(可选)
用途
- 用于真空设备,如高能加速器压力测量
- 用于超高、极高真空设备的压力测量
规格
Model | ISX2 |
Measurable pressure range | 5×10-11 to 1×10-2 Pa (3.75×10-13 to 7.5×10-5 Torr, 5×10-13 to 1×10-4 mbar) |
Measurement resolution | 0.5×10-10 Pa (0.375×10-12 Torr, 0.5×10-12 mbar) |
Display | Digital indication, 3 digit mantissa, 2 digit exponent |
DEGAS | Electron stumilated desorption式 |
Measurement value output | Linear output 0 to10 VDC |
Pseudo-logarithmic output 0 to 10V (1V linear signal in each digit ) | |
Set points | 2 points |
Operating temperature range | 10 to 40˚C (50 to 104˚F) |
Operating humidity range | 15 to 80% (not condensing) |
Power supply voltage | AC85 to 240V |
External dimensions W×D×H | 240mm×350mm×99mm |
Weight | 5.3kg |
Standard accessories | AC100V (3P plug with ground) power cable, Manual |
Option | Sensor: X-11 |
Sensor cable: 5, 10, 20m | |
BCD output, RS232C/485 |
Compatible sensor head | X-11 |
Energy filter | Bessel-Box type |
Filament | Ir・Y2O3×2 |
Mount flange | UFC-070 |
Max. baking temperature | 300℃ (572˚F) without sensor cable |