热阴极电离真空计

通用型

GI 系列

GI-M2

アルバック

可测量中真空~超高真空领域的热阴极电离真空计。
10+1~10-8 Pa(金属管型、GI-M2)、10-1~10-6 Pa(玻璃管型、GI-D7)

特点

  • 可以从9.9Pa到5×10-8 Pa宽范围内进行测量(GI-M2)
  • 可以根据应用来选择测定子(其他型号的本体也可以)
  • 小型测定子・金属制成,可以防止意外事故,如被打碎等(GI-M2)
  • 可以根据气体类型设定灵敏度,因此可以进行更精确的压力测量
  • 适用于固定的测量范围
  • 可以输出2个设定点
  • 可进行灯丝切换,灵敏度设置,范围保持设置,DEGAS设置等。
  • 标准配有RS232C通信
  • 标准配有BCD输出
  • 圧力输出0~10V(模拟Log输出)

用途

      GI-M2
  • 溅射设备
  • 蒸发设备(涡轮分子泵)
  • 其他超高真空・高真空设备等

规格

Product name Metal Ionization Vacuum Gauge Glass Ionization Vacuum Gauge
Model model GI-M2 model GI-D7
Measurable pressure range

5.00×10-8 to 9.99×100 Pa(3.75×10-10 to 7.49×10-2 Torr,5.00×10-10 to 9.99×10-2 mbar)

WIT:1.30×10-5 to 6.7×10-1 Pa

WIB:1.30×10-6 to 2.3×10-2 Pa

Accuracy ±15%
Pressure indication Didital indication 2 digit mantissa, 1 digit exponent
Compatible sensor head M-11, M-12, M-13, M-14, M-15 WIT-G1, WIT-G2, WIT-G3, WIB-G5, WIB-N3
Sampling time 100ms
DEGAS Direct electrical heating of grid AC power 1.5VA
Functions Range hold function, Gas sensitivity setting, Filament selection
Measurement value output linear output 0 to 10 VDC, Pseudo-logarithmic output 0-10VDC(1V linear signal in each digit), Log output
Control input REMOTE/LOCAL, Filament ON/OFF, Filament 1/2, DEGAS ON/OFF, Range hold
Control output Analog output(0-10V), BCD output, Filament ON/OFF, Emission current setting, Degassing ON/OFF
Set point(contact point capacity) 2 point(AC125Vmax, 0.5Amax / DC24Vmax, 1.0Amax)
Serial communication spec RS232C
Operating temperature range 10 to 40℃(50 to 104?)
Operating humidity range 15 to 18%(not condensing)
Power supply voltage AC100±10V 50/60Hz, 60VA AC100±10V 50/60Hz, 120VA
Fuse BS. SEMKO 3.15A (2pcs)
External dimensions W×D×H 240mm×380mm×99mm
Weight 5.6kg 5.7kg
Standard accessories Power cord 3P Plug with ground
Connector For external input / output
Quick manual 1 pc
Options Sensor cable 2, 5, 10, 15, 20, 25, 30, 35, 40, 45, 50, 55, 60m 4, 10, 15, 20, 25, 30m
Gauge head Metal Gauge:M-11, M-12, M-13, M-14, M-15

Triode type glass gauge:WIT-G1, WIT-G2, WIT-G3

B-A type glass gauge:WIB-G5

B-A tupe nude gauge:WIB-N3

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