多级罗茨型干泵

HR/UR 系列

UR3601-TT

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干泵HR/UR系列,根据独有的高温均热化技术,有效利用压缩热,实现了在CVD,蚀刻等硬工艺中的高耐久性。在轻工艺中,与ECO-SHOCK的组合最多可节省约88%的电力。 另外,提高了维护性和降低了噪音,全部型号CE对应可能(可选)。关于ECO-SHOCK的详细信息,请参考关联信息。

特点

  • HR系列/UR系列:高温领域
  • CVD,蚀刻等产生的可升华的废气物质可以在气体状态下排出。
  • 1002msec内瞬时中断。
  • 符合CE标志(可选)。

用途

  • 活性气体(CVD、干刻等)
  • 惰性气体(溅射,蒸发,热处理等)
  • 放入取出室排气时间缩短(LR系列)
  • 产生粉尘的工艺的排气(Si单晶体上升等)
  • 作为辅助排气泵(涡轮分子泵、机械增压泵的辅助排气)

规格

Model LR/HR
60
LR/HR
90
LR
180
LR
421
LR
421-T
UR
421-T
LR/HR
300
LR/HR
600
UR
600
LR/HR
1200
UR
1200
Pump DRP LR/HR
60
LR/HR
90
LR
180
LR
421
LR
421-T
UR
421-T
LR/HR
60
LR/HR
90
UR
90
LR/HR
90
UR
90
MBP PRC-003A PRC-006A PRC-012A
Max. pumping speed m3/h 50Hz 62 112 183 440 440 410 359 653 653 1012 1012
60Hz 80 126 237 365 701 1051
L/min 50Hz 1030 1860 3100 7333 7333 6833 5980 10900 10883 16900 16867
60Hz 1333 2100 3950 6080 11700 17500
Ultimate pressure Pa 5.0 0.67
Max. inlet pressure Atmospheric pressure *
Max. exhaust pressure 1.0 to Atmospheric pressure
Inlet diameter (type CE) VG50
(KF40)
VG80(KF50) VG100 VG80(KF80) VG100(KF100)
Outlet diameter KF40 VG50 KF40
DRP: Rotor blade surface treatment
MBP: Rotor blade surface treatment - - - - - - ○ * ○ * ○ *
Weight kg 180 245 335 415 251 371 403
Power Three phase VAC
(Hz)
200(50/60), 220(60) 180~240/380~440(50/60) 200(50/60), 220(60)
Current At ultimate pressure A 6.9/7.1 11.2 18.9 20.8 23 7.0/7.8 12.3/12.9 16.4 13.7/15.4 18.9
At max. load A 7.0/7.3 11.8 20.6 48.5 52.5 9.6/8.1 19.0/13.8 17.3 24.2/18.9 22.4
Cooling water Supply pressure MPa 0.1 to 0.3 0.2 to 0.5 0.1 to 0.3
Cooling water
In/Out differrence
pressure
MPa >0.1 >0.2 >0.1
Cooling water
Flow rate
L/min >5.0 >4.0 >5.0 >5.0
N2 gas Supply pressure MPa 0.1 ~ 0.5
Regu-lated pressure MPa 0.05 ~ 0.1
N2 purge Shaft purge SLM 5
Gas ballast SLM 0~45 None *1 0~45 0~195 0~45

*Please specify voltage at the time of ordering.
*LR pump designed for low operating temperature of the pump body. The HR is for high temperature pump body operation. While the UR series is for Ultra High pump body temperature.
*The HR300, HR600, HR1200,UR600,UR1200,UR1800 and UR3601-TT models should all be operated below 200Pa (1.5 Torr).
*The LR3601-R/TR/TTR is an improved exhaust performance model in the high-pressure area.
*〇=with  ×=with out

*MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
*Additionally, a pump with gasballast use is possible to quote. Please contact us for the selection and quotion.

Model LR1800 UR1800 LR3601 LR3601-TT LR3601-R LR3601-TR(TTR) UR3601-TT
Pump DRP LR180 UR180 LR421 LR421-T LR421 LR421-T UR421-T
MBP PRC-018A PRC-036C PRC-036C(-T) PRC-036D PRC-036D(D-T) PRC-036C-T
Max. pumping speed m3/h 50Hz 1701 1701 3200 2700
60Hz 1784
L/min 50Hz 28350 28350 53333 45000
60Hz 29700
Ultimate pressure Pa 0.67
Max. inlet pressure Atmospheric pressure *
Max. exhaust pressure 1.0 to Atmospheric pressure
Inlet diameter (type CE) VG150(KF100) VG150
Outlet diameter KF40 KF50
DRP: Rotor blade surface treatment
MBP: Rotor blade surface treatment ○ * × T:× TT:○ × TR:× TTR:○
Weight kg 553 660 720 660 720 720
Power Three phase VAC(Hz) 200(50/60),220(60) 180~240/380~440(50/60)
Current At ultimate pressure A 21.4 29.2 31 35.4 39.8
At max. load A 39.8 34.9 58.4 82 68.3
Cooling water
Supply pressure
MPa 0.1 to 0.3 0.2 to 0.5
Cooling water
In/Out differrencepressure
MPa >0.1 >0.2
Cooling water
Flow rate
L/min >5.0 >4.0 >5.0
N2 gas Supply pressure MPa 0.1 ~ 0.5
Regula-
ted pressure
MPa 0.05 ~ 0.1
N2 purge
Shaft purge SLM 5
Gas ballast SLM 0~45 0~195 None *1 0~45 None *1 0~45 0~195

*Please specify voltage at the time of ordering.
*LR pump designed for low operating temperature of the pump body. The HR is for high temperature pump body operation. While the UR series is for Ultra High pump body temperature.
*The HR300, HR600, HR1200,UR600,UR1200,UR1800 and UR3601-TT models should all be operated below 200Pa (1.5 Torr).
*The LR3601-R/TR/TTR is an improved exhaust performance model in the high-pressure area.
* 〇=with  ×=with out
* MBP of LR300, LR600, LR1200, LR1800, can choose the existence of a surface treatment.
* Additionally, a pump with gasballast use is possible to quote. Please contact us for the selection and quotion.

Silencer (Option)

Model Material Surface treatment Weight (kg) Flange Connection
RS-01 SUS304 GBB treatment 4.1 NW40
RS-02 SUS304 GBB treatment 8.3 NW40
RS-03 SUS304 Polished plate 12.5 NW50

Acceptable Table

Kit type Agreement Clamp Outer ring Connection Flange Stay
RS-01 kitA LR60,LR90,LR300 1 1 - -
RS-01 kitB LR600,LR1200 2 2 1 1
RS-02 kitA LR180(LR60,LR90,LR300) 2 2 1 1
RS-02 kitB LR1800(LR600,LR1200) 2 2 1 1
RS-03 kitA LR421(-T) 1 1 1 1
RS-03 kitB LR3601(-T/TT/R/TR/TTR) 3 3 1 1

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