VD60C

アルバック

VD系列Ver.C是装载了ULVAC原创的高效率(IE3)多电压马达的油回转真空泵。双级旋转叶片式油回转真空泵能达到较低的极限压力，优化设计实现了泵的低噪音运行，配件种类充实，用途非常广泛。

特点

采用ULVAC原装高效（IE3）多电压电机
支持200至240 V / 380至460 V的宽幅电压。
采用强制加油方式
即使在大气压附近，排气速度也是稳定的。大气和真空间反复切换的最佳选择。
特殊用途也可应用。
除标准品外，还有3种型号（A型，B型和H型），可用于特殊应用。

用途

蒸发设备・溅射设备・离子镀膜设备
分析设备・检漏设备
气体交换・液体注入
真空干燥・冷冻干燥・真空脱气・真空隔热
真空吸附・真空成型
其他各种真空设备

规格

Model			VD30C	VD40C	VD60C	VD90C
Designed pumping speed m³/h /L/min / cfm		50 Hz	30/500/17.66	40/670/23.54	60/1000/35.31	90/1500/52.97
		60 Hz	36/600/21.29	48/800/28.25	72/1200/42.38	108/1800/63.57
Ultimate pressure Pa/Torr/mbar *1		GP close	0.67/5×10^-3/6.7×10^-3
		GP open	6.7/5×10^-2/6.7×10^-2
Maximum water vapor tolerance Pa/Torr/mbar	GP open	50 Hz	1300/9.8/13.0	1360/10.2/13.6	1320/9.9/13.2	970/7.3/9.7
		60 Hz	1400/10.5/14.0	1760/13.2/17.6	2800/21.0/28.0	2820 *2/21.2/28.2
Maximum water vapor capacity g/h	GP open	50 Hz	190	270	430	480
		60 Hz	250	410	1100	1650 *2
Motor	Type		Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class		IE3
	kw/HP(number of poles)		1.5(4)	1.5(4)	2.2(4)	3.7(4)
	Voltage *4	50 Hz	200～240 / 380～415
		60 Hz	200～240 / 380～460
Oil			ULVOIL R-72
Oil capacity L			1.0～2.5		2.5～4.0
Cooling method			Air cooled
Inlet			VG40 equivalency / KF40 (optional)		VG50 equivalency / KF50 (optional)
Outlet			VG40 equivalency / KF40 (optional)
Weight kg			58	60	90	113
External dimensions W×D×H mm			210×660×324	210×680×324	280×761×371	280×831×371
Applicable standard			CE
Standard accessory			A dose of oil, a set of manual
Recommended oil mist trap (Optional) *5			TM201: for low load operation TM401: for high load operation		TM401: for low load operation TM-2: for high load operation
Options			Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application (spec A, B and H)

*1　Measured with a Pirani gauge. (Apprx. 6.7X10^-2Pa when measured with a McLeod vacuum gauge.)
*2　VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more. VD90C maximum water vapor tolerance / maximum water vapor capacity (in the continuous operation) : 1000Pa / 600g/h
*3　Increased safety explosion-resistant motor and pressure proof explosion-resistant motor are available as an option.
*4　Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.
*5 High load operation means repeat pumping down between atmospheric pressure and vacuum in short term or long time operation at 10,000 Pa (75 Torr) or higher.

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规格

Model			VD30C	VD40C	VD60C	VD90C
Designed pumping speed m³/h /L/min / cfm		50 Hz	30/500/17.66	40/670/23.54	60/1000/35.31	90/1500/52.97
		60 Hz	36/600/21.29	48/800/28.25	72/1200/42.38	108/1800/63.57
Ultimate pressure Pa/Torr/mbar *1		GP close	0.67/5×10^-3/6.7×10^-3
		GP open	6.7/5×10^-2/6.7×10^-2
Maximum water vapor tolerance Pa/Torr/mbar	GP open	50 Hz	1300/9.8/13.0	1360/10.2/13.6	1320/9.9/13.2	970/7.3/9.7
		60 Hz	1400/10.5/14.0	1760/13.2/17.6	2800/21.0/28.0	2820 *2/21.2/28.2
Maximum water vapor capacity g/h	GP open	50 Hz	190	270	430	480
		60 Hz	250	410	1100	1650 *2
Motor	Type		Totally enclosed fan cooled 3 phase induction motor
	Energy efficiency class		IE3
	kw/HP(number of poles)		1.5(4)	1.5(4)	2.2(4)	3.7(4)
	Voltage *4	50 Hz	200～240 / 380～415
		60 Hz	200～240 / 380～460
Oil			ULVOIL R-72
Oil capacity L			1.0～2.5		2.5～4.0
Cooling method			Air cooled
Inlet			VG40 equivalency / KF40 (optional)		VG50 equivalency / KF50 (optional)
Outlet			VG40 equivalency / KF40 (optional)
Weight kg			58	60	90	113
External dimensions W×D×H mm			210×660×324	210×680×324	280×761×371	280×831×371
Applicable standard			CE
Standard accessory			A dose of oil, a set of manual
Recommended oil mist trap (Optional) *5			TM201: for low load operation TM401: for high load operation		TM401: for low load operation TM-2: for high load operation
Options			Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application (spec A, B and H)