油回转真空泵

VD 系列

VD90C(日本产) / VDN902(中国产)

アルバック

VD系列Ver.C是装载了ULVAC原创的高效率(IE3)多电压马达的油回转真空泵。双级旋转叶片式油回转真空泵能达到较低的极限压力,优化设计实现了泵的低噪音运行,配件种类充实,用途非常广泛。

特点

  • 采用ULVAC原装高效(IE3)多电压电机
    支持200至240 V / 380至460 V的宽幅电压。
  • 采用强制加油方式
    即使在大气压附近,排气速度也是稳定的。 大气和真空间反复切换的最佳选择。
  • 特殊用途也可应用。
    除标准品外,还有3种型号(A型,B型和H型),可用于特殊应用。

用途

  • 蒸发设备・溅射设备・离子镀膜设备
  • 分析设备・检漏设备
  • 气体交换・液体注入
  • 真空干燥・冷冻干燥・真空脱气・真空隔热
  • 真空吸附・真空成型
  • 其他各种真空设备

规格

Model VD30C VD40C VD60C VD90C
Designed pumping speed
m3/h /L/min / cfm
50
Hz
30/500/17.66 40/670/23.54 60/1000/35.31 90/1500/52.97
60
Hz
36/600/21.29 48/800/28.25 72/1200/42.38 108/1800/63.57
Ultimate pressure Pa/Torr/mbar *1 GP close 0.67/5×10-3/6.7×10-3
GP open 6.7/5×10-2/6.7×10-2
Maximum water vapor tolerance Pa/Torr/mbar GP open 50
Hz
1300/9.8/13.0 1360/10.2/13.6 1320/9.9/13.2 970/7.3/9.7
60
Hz
1400/10.5/14.0 1760/13.2/17.6 2800/21.0/28.0 2820 *2/21.2/28.2
Maximum water vapor capacity g/h GP open 50
Hz
190 270 430 480
60
Hz
250 410 1100 1650 *2
Motor Type Totally enclosed fan cooled 3 phase induction motor
Energy efficiency class IE3
kw/HP(number of poles) 1.5(4) 1.5(4) 2.2(4) 3.7(4)
Voltage *4 50
Hz
200~240 / 380~415
60
Hz
200~240 / 380~460
Oil ULVOIL R-72
Oil capacity L 1.0~2.5 2.5~4.0
Cooling method Air cooled
Inlet VG40 equivalency / KF40 (optional) VG50 equivalency / KF50 (optional)
Outlet VG40 equivalency / KF40 (optional)
Weight kg 58 60 90 113
External dimensions W×D×H mm 210×660×324 210×680×324 280×761×371 280×831×371
Applicable standard CE
Standard accessory A dose of oil, a set of manual
Recommended oil mist trap (Optional) *5 TM201: for low load operation
TM401: for high load operation
TM401: for low load operation
TM-2: for high load operation
Options Oil mist trap, other oil types, gas ballast valve, ISO flange, explosion-resistant motor, special type for special application (spec A, B and H)

*1 Measured with a Pirani gauge. (Apprx. 6.7X10-2Pa when measured with a McLeod vacuum gauge.)
*2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more. VD90C maximum water vapor tolerance / maximum water vapor capacity (in the continuous operation) : 1000Pa / 600g/h
*3 Increased safety explosion-resistant motor and pressure proof explosion-resistant motor are available as an option.
*4 Factory shipment setup is 200V class Δ delta connection. Please change it to Y connection if working voltage is 400V class.
*5 High load operation means repeat pumping down between atmospheric pressure and vacuum in short term or long time operation at 10,000 Pa (75 Torr) or higher.

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