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油回转真空泵
VS 系列
VS2401(日本产) / VSN2401(中国产)
アルバック
VS系列是单级旋转叶片式油回转真空泵。通过简化构造，实现了小型化、轻量化，并且大幅度降低了振动，因此可以减少安装成本。同时，因为强化了油循环系统和冷却水系统，高吸入压的排气性能稳定。VS系列泵有广泛的应用领域，尤其适用于反复排气次数多的工艺。
特点
- 低震动・低噪音
- 轻量・紧凑
- 能够在所有压力范围内连续运行
- 出色的维护性
用途
- 蒸发设备・溅射设备・离子镀膜设备
- 分析设备・检漏设备
- 气体交换・液体注入
- 真空干燥・冷冻干燥・真空脱气・真空隔热
- 真空吸附・真空成型
- 其他各种真空设备
规格
| Model | VS1501 | VS2401 | |
| Design evacuation speed | 50Hz | 150m3/h(2500L/min) | 240m3/h(4000L/min) |
| 60Hz | 180m3/h(3000L/min) | 288m3/h(4800L/min) | |
| Final pressure *1 | 5.3Pa | ||
| Motor *2 | Type | Totally enclosed fan cooled motor | |
| number of poles | 5.5kW(4P) | 7.5kW(4P) | |
| Voltage/frequency | 200V/50,60Hz 220V/60Hz | ||
| Required oil volume | 8.0～10.5L | ||
| Oil *3 | ULVOIL R-7 | ||
| Cooling water | Pressure | ≦ 0.5MPa (gauge pressure) | |
| Flow rate | 4L/min | 5L/min | |
| Temperature | 5～30℃ | ||
| Intake size | JIS B 2290 | VG80 size | |
| Vent size | JIS B 2290 | VG50 size | |
| External dimensions W x D x H | 940 x 352 x 460mm | 1062 x 352 x 460mm | |
| Weight *4 | 240kg | 280kg | |
| Standard accessories | Motor (attached), oil for 1 pump, operating instructions (1 copy) |
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| Options | Oil mist trap, gas ballast valve, oil return mechanism | ||
Note:
SI units are used in this specification. The following conversion can be used for non-SI units.
Ultimate pressure: 5.3Pa=4 x 10-2 Torr
Cooling water presuure: 0.5MPa=5kg/cm2
*1 Measured by pirani vacuum gauge
*2 Options: The pump is also compatible with a increased safety explosion-resistant motor and pressure-proof explosion-resistant flange motor.
*3 Other oil types are available, upon request.
*4 Values in parentheses indicate the weight of the pump unit only.
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