油回转真空泵

VS 系列

VS2401(日本产) / VSN2401(中国产)

アルバック

VS系列是单级旋转叶片式油回转真空泵。通过简化构造,实现了小型化、轻量化,并且大幅度降低了振动,因此可以减少安装成本。同时,因为强化了油循环系统和冷却水系统,高吸入压的排气性能稳定。VS系列泵有广泛的应用领域,尤其适用于反复排气次数多的工艺。

特点

  • 低震动・低噪音
  • 轻量・紧凑
  • 能够在所有压力范围内连续运行
  • 出色的维护性

用途

  • 蒸发设备・溅射设备・离子镀膜设备
  • 分析设备・检漏设备
  • 气体交换・液体注入
  • 真空干燥・冷冻干燥・真空脱气・真空隔热
  • 真空吸附・真空成型
  • 其他各种真空设备

规格

Model VS1501 VS2401
Design evacuation speed 50Hz 150m3/h(2500L/min) 240m3/h(4000L/min)
60Hz 180m3/h(3000L/min) 288m3/h(4800L/min)
Final pressure *1 5.3Pa
Motor *2 Type Totally enclosed fan cooled motor
number of poles 5.5kW(4P) 7.5kW(4P)
Voltage/frequency 200V/50,60Hz 220V/60Hz
Required oil volume 8.0~10.5L
Oil *3 ULVOIL R-7
Cooling water Pressure ≦ 0.5MPa (gauge pressure)
Flow rate 4L/min 5L/min
Temperature 5~30℃
Intake size JIS B 2290 VG80 size
Vent size JIS B 2290 VG50 size
External dimensions W x D x H 940 x 352 x 460mm 1062 x 352 x 460mm
Weight *4 240kg 280kg
Standard accessories Motor (attached), oil for 1 pump,
operating instructions (1 copy)
Options Oil mist trap, gas ballast valve, oil return mechanism

Note:
SI units are used in this specification. The following conversion can be used for non-SI units.
Ultimate pressure: 5.3Pa=4 x 10-2 Torr
Cooling water presuure: 0.5MPa=5kg/cm2

*1 Measured by pirani vacuum gauge
*2 Options: The pump is also compatible with a increased safety explosion-resistant motor and pressure-proof explosion-resistant flange motor.
*3 Other oil types are available, upon request.
*4 Values in parentheses indicate the weight of the pump unit only.

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