油回转真空泵
VS 系列
VS2401(日本产) / VSN2401(中国产)
アルバック
特点
- 低震动・低噪音
- 轻量・紧凑
- 能够在所有压力范围内连续运行
- 出色的维护性
用途
- 蒸发设备・溅射设备・离子镀膜设备
- 分析设备・检漏设备
- 气体交换・液体注入
- 真空干燥・冷冻干燥・真空脱气・真空隔热
- 真空吸附・真空成型
- 其他各种真空设备
规格
Model | VS1501 | VS2401 | |
Design evacuation speed | 50Hz | 150m3/h(2500L/min) | 240m3/h(4000L/min) |
60Hz | 180m3/h(3000L/min) | 288m3/h(4800L/min) | |
Final pressure *1 | 5.3Pa | ||
Motor *2 | Type | Totally enclosed fan cooled motor | |
number of poles | 5.5kW(4P) | 7.5kW(4P) | |
Voltage/frequency | 200V/50,60Hz 220V/60Hz | ||
Required oil volume | 8.0~10.5L | ||
Oil *3 | ULVOIL R-7 | ||
Cooling water | Pressure | ≦ 0.5MPa (gauge pressure) | |
Flow rate | 4L/min | 5L/min | |
Temperature | 5~30℃ | ||
Intake size | JIS B 2290 | VG80 size | |
Vent size | JIS B 2290 | VG50 size | |
External dimensions W x D x H | 940 x 352 x 460mm | 1062 x 352 x 460mm | |
Weight *4 | 240kg | 280kg | |
Standard accessories | Motor (attached), oil for 1 pump, operating instructions (1 copy) |
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Options | Oil mist trap, gas ballast valve, oil return mechanism |
Note:
SI units are used in this specification. The following conversion can be used for non-SI units.
Ultimate pressure: 5.3Pa=4 x 10-2 Torr
Cooling water presuure: 0.5MPa=5kg/cm2
*1 Measured by pirani vacuum gauge
*2 Options: The pump is also compatible with a increased safety explosion-resistant motor and pressure-proof explosion-resistant flange motor.
*3 Other oil types are available, upon request.
*4 Values in parentheses indicate the weight of the pump unit only.
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