油回转真空泵
VS 系列
VS650A(日本产) / VSN6501(中国产)
アルバック
特点
- 650m3/h和750m3/h准备了两个型号。 通过与机械增压泵结合,可以实现更大的排气量。
- 低震动
可以减少振荡活塞泵等低频范围内的振动,不再需要工厂的基础建筑施工。 可以在较高楼层安装。 - 出色的维护性
大油箱(油量:最大30 L)延长换油周期。 此外,提供了一个大开口,用于清洁油箱内部,更换油也更容易。 - 内置油雾过滤器
油箱内置有油雾过滤器。 筒式过滤器更易于更换。 - 可以根据安装环境选择空气冷却和水冷。 采用油冷却器降低油温。
用途
- 蒸发设备・溅射设备・离子镀膜设备
- 分析设备・检漏设备
- 气体交换・液体注入
- 真空干燥・冷冻干燥・真空脱气・真空隔热
- 真空吸附・真空成型
- 其他各种真空设备
规格
Specifications | VS650A-A | VS650A-W | VS750A-A | VS750A-W | |||
Design evacuation speed m3/h(L/min) |
50Hz | 650(10833) | 750(12500) | ||||
60Hz | 750(12500) | n/a | |||||
Ultimate pressure *1 Pa | GP close | 8 Pa | |||||
GP1 open | ≦50 | ||||||
GP1-2 open | ≦60 | ||||||
Max. water vapor tolerance *2 Pa | GP1 open | 50Hz | 4500 | 2500 | 5500 | 2500 | |
60Hz | 5500 | 2500 | n/a | ||||
GP1-2 open | 50Hz | 6000 | 3800 | 7500 | 4000 | ||
60Hz | 7500 | 4000 | n/a | ||||
Max. water vapor capacity *2 kg/h | GP1 open | 50Hz | 17 | 11 | 24 | 13 | |
60Hz | 24 | 13 | n/a | ||||
GP1-2 open | 50Hz | 26 | 15 | 34 | 19 | ||
60Hz | 34 | 19 | n/a | ||||
Motor *3 | Type | Totally enclosed external fan 3 phase AC motor | |||||
kw(Poles) | 22(4) | ||||||
Power consumption kW *6 | 50Hz | 200~240/380~415 | |||||
60Hz | 200~240/380~460 | n/a | |||||
Oil *4 | ULVOIL R-7 | ||||||
Oil capacity L | 23~27 | 25~30 | 23~27 | 25~30 | |||
Cooling method | Air cooled | Water cooled | Air cooled | Water cooled | |||
Cooling water | Primary side pressure MPa | - | ≥0.5 | - | ≥0.5 | ||
Inlet/outlet differential pressure MPa | - | ≥0.1 | - | ≥0.1 | |||
Capacity L/min | - | ≥3.0 | - | ≥3.0 | |||
Temperature °C | - | 5~30 | - | 5~30 | |||
Inlet | DN100 ISO-K | ||||||
Outlet | DN100 ISO-K | ||||||
Weight kg | 806 | 800 | 802 | 796 | |||
External dimensions W×D×H mm | 1490×905×705 | 1490×841×705 | 1490×905×705 | 1490×841×705 | |||
Applicable standard | CE/cTUVus | ||||||
Standard accessories | Oil for one pump, 1 set of instruction manual | ||||||
Options | explosion-protection motor, flame-proof motor, specified voltage motor, JIS flange *5, gas ballast valve 2 (manual) |
Model | PMB2400D +VS650A-A |
PMB2400D +VS650A-W |
PMB2400D +VS750A-A |
PMB2400D +VS750A-W |
|||
Design evacuation speed m3/h(L/min) |
50Hz | 2500(41667) | 3100(51667) | ||||
60Hz | 3100(51667) | n/a | |||||
Ultimate pressure *1 Pa | GP close | ≤0.8 | |||||
GP1 open | ≤5 | ||||||
GP1-2 open | ≤6 | ||||||
Max. water vapor tolerance *2 Pa | GP GP1 open |
50Hz | 1200 | 750 | 1600 | 700 | |
60Hz | 1600 | 700 | n/a | ||||
GP GP1-2 open |
50Hz | 2500 | 1200 | 2800 | 1200 | ||
60Hz | 2800 | 1200 | n/a | ||||
Max. water vapor tolerance *2 kg/h | GP GP1 open |
50Hz | 16 | 10 | 24 | 11 | |
60Hz | 24 | 11 | n/a | ||||
GP GP1-2 open |
50Hz | 26 | 15 | 34 | 19 | ||
60Hz | 34 | 19 | n/a | ||||
Motor *3 | Type | Totally enclosed external fan 3 phase AC motor | |||||
kW(Poles) | MBP:7.5(2)+ RP:22(4) | ||||||
Power consumption kW *6 | 50Hz | 9 | 12 | ||||
60Hz | 12 | n/a | |||||
Voltage V | 50Hz | 200~240/380~415 | 200~240/380~415 | ||||
60Hz | 200~240/380~460 | n/a | |||||
Oil *4 | MBP:ULVOIL R-4+RP:ULVOIL R-7 | ||||||
Oil capacity L | MBP:3.6~4.0 RP:23~27 |
MBP:3.6~4.0 RP:25~30 |
MBP:3.6~4.0 RP:23~27 |
MBP:3.6~4.0 RP:25~30 |
|||
Cooling method | Air cooled *7 | Water cooled | Air cooled *7 | Water cooled | |||
Cooling water | Primary side pressure MPa | - | ≥0.5 | - | ≥0.5 | ||
Inlet/outlet differential pressure MPa | - | ≥0.1 | - | ≥0.1 | |||
Capacity L/min | MBP:≥3.0 PR:≥3.0 |
≥3.0 | - | MBP:≥3.0 PR:≥3.0 |
|||
Temperature °C | - | 5~30 | - | 5~30 | |||
Inlet | VG200/DN 160 ISO-K (option) | ||||||
Outlet | DN100 ISO-K | ||||||
Weight kg | 1076 | 1070 | 1072 | 10666 | |||
External dimensions W×D×H mm |
1490×905×1260 | 1490×841×1260 | 1490×905×1260 | 1490×841×1260 | |||
Applicable standard | CE/cTUVus | ||||||
Standard accessories | Oil for one pump, 1 set of instruction manual | ||||||
Options | [For MBP] explosion-protection motor,flame-proof motor,specified voltage motor,ISO flange, Atmospheric pressure start type (Inverter) MBP adapter |
*1 Measured with a Pirani vacuum gauge.(Approx. 0.8Pa when measured with a McLeod vacuum gauge.)
*2 Water vapor tolerance and capacity are measured under following cooling water capacity. Cooling water temperature at inlet port is 26°C (78.8F).
Model | VS650A-W | VS750A-W | |
GP1 open | 50Hz | 3 L/min. | 5 L/min. |
60Hz | 5 L/min. | - | |
GP1・2 open | 50Hz | 3 L/min. | 5 L/min. |
60Hz | 5 L/min. | - |
*3 Increased safety explosion-resistant motor and pressure proof explosion-resistant flange motor are available as option. However, multiple voltage cannot be selected.
*4 Other oil types are available, upon request.
*5 Size to connect pipe changes when JIS flange is selected for inlet/outlet port.
*6 At ultimate pressure
*7 Only with inverter. At 400-50000Pa, the pumping speed specification of air cooled is reduced than that of the water cooled.
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