油回转真空泵

VS 系列

VS750A(日本产) / VSN7501(中国产)

アルバック

VS650A/VS750A 是单级旋转叶片式油回转真空泵。大排气量可以得到稳定的排气性能,低振动可以减少安装时基础施工等带来的成本。同时,冷却方式可以选择空冷或者水冷,可根据安装环境选择。

特点

  • 650m3/h和750m3/h准备了两个型号。 通过与机械增压泵结合,可以实现更大的排气量。
  • 低震动
    可以减少振荡活塞泵等低频范围内的振动,不再需要工厂的基础建筑施工。 可以在较高楼层安装。
  • 出色的维护性
    大油箱(油量:最大30 L)延长换油周期。 此外,提供了一个大开口,用于清洁油箱内部,更换油也更容易。
  • 内置油雾过滤器
    油箱内置有油雾过滤器。 筒式过滤器更易于更换。
  • 可以根据安装环境选择空气冷却和水冷。 采用油冷却器降低油温。

用途

  • 蒸发设备・溅射设备・离子镀膜设备
  • 分析设备・检漏设备
  • 气体交换・液体注入
  • 真空干燥・冷冻干燥・真空脱气・真空隔热
  • 真空吸附・真空成型
  • 其他各种真空设备

规格

Specifications VS650A-A VS650A-W VS750A-A VS750A-W
Max. pumping speed m3/h(L/min) 50Hz 650(10833) 750(12500)
60Hz 750(12500) n/a
Ultimate pressure *1 Pa GP close 8 Pa
GP1 open ≦50
GP1-2 open ≦60
Max. water vapor tolerance *2 Pa GP1 open 50Hz 4500 2500 5500 2500
60Hz 5500 2500 n/a
GP1-2 open 50Hz 6000 3800 7500 4000
60Hz 7500 4000 n/a
Max. water vapor capacity *2 kg/h GP1 open 50Hz 17 11 24 13
60Hz 24 13 n/a
GP1-2 open 50Hz 26 15 34 19
60Hz 34 19 n/a
Motor *3 Type Totally enclosed external fan 3 phase AC motor
kw(Poles) 22(4)
Power consumption kW *6 50Hz 200~240/380~415
60Hz 200~240/380~460 n/a
Oil *4 ULVOIL R-7
Oil capacity L 23~27 25~30 23~27 25~30
Cooling method Air cooled Water cooled Air cooled Water cooled
Cooling water Primary side pressure MPa ≥0.5 ≥0.5
Inlet/outlet differential pressure MPa ≥0.1 ≥0.1
Capacity L/min ≥3.0 ≥3.0
Temperature °C 5~30 5~30
Inlet DN100 ISO-K
Outlet DN100 ISO-K
Weight kg 806 800 802 796
External dimensions W×D×H mm 1490×905×705 1490×841×705 1490×905×705 1490×841×705
Applicable standard CE/cTUVus
Standard accessories Oil for one pump, 1 set of instruction manual
Options explosion-protection motor, flame-proof motor, specified voltage motor, JIS flange *5, gas ballast valve 2 (manual)

Model PMB2400D
+VS650A-A
PMB2400D
+VS650A-W
PMB2400D
+VS750A-A
PMB2400D
+VS750A-W
Max. pumping speed m3/h(L/min) 50Hz 2500(41667) 3100(51667)
60Hz 3100(51667) n/a
Ultimate pressure *1 Pa GP close 0.8
GP1 open 5
GP1-2 open 6
Max. water vapor tolerance *2 Pa GP
GP1 open
50Hz 1200 750 1600 700
60Hz 1600 700 n/a
GP
GP1-2 open
50Hz 2500 1200 2800 1200
60Hz 2800 1200 n/a
Max. water vapor tolerance *2 kg/h GP
GP1 open
50Hz 16 10 24 11
60Hz 24 11 n/a
GP
GP1-2 open
50Hz 26 15 34 19
60Hz 34 19 n/a
Motor *3 Type Totally enclosed external fan 3 phase AC motor
kW(Poles) MBP:7.5(2)+ RP:22(4)
Power consumption kW *6 50Hz 9 12
60Hz 12 n/a
Voltage V 50Hz 200~240/380~415 200~240/380~415
60Hz 200~240/380~460 n/a
Oil *4 MBP:ULVOIL R-4+RP:ULVOIL R-7
Oil capacity L MBP:3.6~4.0
RP:23~27
MBP:3.6~4.0
RP:25~30
MBP:3.6~4.0
RP:23~27
MBP:3.6~4.0
RP:25~30
Cooling method Air cooled *7 Water cooled Air cooled *7 Water cooled
Cooling water Primary side pressure MPa ≥0.5 ≥0.5
Inlet/outlet differential pressure MPa ≥0.1 ≥0.1
Capacity L/min MBP:≥3.0
PR:≥3.0
≥3.0 MBP:≥3.0
PR:≥3.0
Temperature °C 5~30 5~30
Inlet VG200/DN 160 ISO-K (option)
Outlet DN100 ISO-K
Weight kg 1076 1070 1072 10666
External dimensions
W×D×H mm
1490×905×1260 1490×841×1260 1490×905×1260 1490×841×1260
適合規格 CE/cTUVus
標準付属品 Oil for one pump, 1 set of instruction manual
Options [For MBP]
explosion-protection motor,flame-proof motor,specified voltage motor,ISO flange, Atmospheric pressure start type (Inverter) MBP adapter

*1 Measured with a Pirani vacuum gauge.(Approx. 0.8Pa when measured with a McLeod vacuum gauge.)

*2 Water vapor tolerance and capacity are measured under following cooling water capacity. Cooling water temperature at inlet port is 26°C (78.8F).

Model VS650A-W VS750A-W
GP1 open 50Hz 3 L/min. 5 L/min.
60Hz 5 L/min.
GP1・2 open 50Hz 3 L/min. 5 L/min.
60Hz 5 L/min.

*3 Increased safety explosion-resistant motor and pressure proof explosion-resistant flange motor are available as option. However, multiple voltage cannot be selected.

*4 Other oil types are available, upon request.

*5 Size to connect pipe changes when JIS flange is selected for inlet/outlet port.

*6 At ultimate pressure

*7 Only with inverter. At 400-50000Pa, the pumping speed specification of air cooled is reduced than that of the water cooled.

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