真空角阀
双动式
VLP 系列
VLPーSA020JH
アルバックテクノ
从大气压到极高真空,对应广泛的需求提供丰富的系列产品。
特点
- SUS角阀可以烘烤至150℃。
- 连接法兰有4种类型可选择:JIS-VF,ISO-KF,ISO-K和ISO-CF。
- 提供单动式和复动式2种。 单动式仅需要一个气动管线。
- 不锈钢材料。 (但是,VLP-U由铁制成,VAP,VAH和VFR由铝制成。)
规格
Model | VLP-SA |
Maximum allowable differential pressure on valve plate (Positive pressure/counter pressure) MPa |
0.10 |
Maximum allowable differential pressure in opening direction (Positive pressure/counter pressure) MPa | 0.10 |
Plate seal | O-ring |
Feedthrough | O-ring |
Actuation | Double-acting cylinder |
External leak rate*1 Pa・m3/s | ≦1.0E-10 |
Internal leak rate*1 Pa・m3/s | ≦1.0E-10 |
Operating pressure range (absolute pressure) Pa |
Atm. ~ 1.0E-5 |
Bakeout temperature (when stopping)*2 ℃ |
Body:150*3, actuation:70 (Indicator: 60) |
Operating ambient temperature ℃ | 5~70 |
Fluid temperature ℃ | 5~70 |
Heating & cooling speed ℃/h | ≦30 |
Operating ambient | Non-corrosive |
Fluid | Non-corrosive |
Compressed air to cylinder MPaG | 0.40 ~ 0.60 |
Warranted operation cycle*4 | 100,000 |
Orientation | No limitation |
Position indicator | Optional (sell separately) |
Material of major parts (Vacuum side) | Stainless steel 304 |
Material of major parts (Atmosphere side) | Stainless steel 304, Aluminum-6061 (anodized aluminum) |
Bellows material | ー |
Seal material (Vacuum side) | FKM |
Grease (Vacuum side) | Fluorine grease |
Attachment for lifting | None*5 |
RoHS | Complied |
*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3 Regarding to VLP-MB abd VLH-MB, maximum body bakeout temperature in opening position: 200℃ (392F) and in closing position: 150℃ (302F).
*4 See instruction manual for detail.
*5 Lifting attachment is included for VLP-SA350JH (Eyebolt M12 x 2pcs).