真空角阀 Model:VLPーU36
ULVAC

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关于Model:VLPーU36的介绍、购买、商讨
从大气压到极高真空,对应广泛的需求提供丰富的Model产品。
特点
- SUS角阀可以烘烤至150℃。
- 连接法兰有4种类型可选择:JIS-VF,ISO-KF,ISO-K和ISO-CF。
- 提供单动式和复动式2种。 单动式仅需要一个气动管线。
- 不锈钢材料。 (但是,VLP-U由铁制成,VAP,VAH和VFR由铝制成。)
规格
Model | VLP-U |
Maximum allowable differential pressure on valve plate (Positive pressure) MPa |
0.10 |
Maximum allowable differential pressure on valve plate (Counter pressure) n/a |
Not available |
Maximum allowable differential pressure in opening direction (Positive pressure) kPa |
1.0 |
Maximum allowable differential pressure in opening direction (Counter pressure) n/a |
Not available |
Plate seal | O-ring |
Feedthrough | O-ring |
Actuation | Double-acting cylinder |
External leak rate*1 Pa・m3/s | ≦1.3E-7 |
Internal leak rate*1 Pa・m3/s | ≦1.3E-7 |
Operating pressure range(absolute pressure) Pa | Atm.~1.0E-5 |
Bakeout temperature(when stopping)*2 ℃ | 60 |
Operating ambient temperature ℃ | 5~40 |
Fluid temperature ℃ | 5~40 |
Heating & cooling speed ℃/h | ≦30 |
Operating ambient | Non-corrosive |
Fluid | Non-corrosive |
Compressed air to cylinder MPaG | 0.40~0.55 |
Warranted operation cycle*3 | 100,000 |
Orientation | Vertical |
Position indicator | Optional (sell separately) |
Material of major parts (Vacuum side) | Steel 400 with Ni plating |
Material of major parts (Atmosphere side) | Steel 400 with Ni plating + acrylic painting |
Seal material (Vacuum side) | Nitrile rubber |
Grease (Vacuum side) | Highly purified paraffin oil |
Attachment for lifting | None/td> |
RoHS | Complied |
■Detail of specification VLP-U
Flange | VF500 |
Conductance in opening position*4 L/s | 9,198 |
Cylinder capacity cc | 9,040 |
Compressed air fitting | Rc3/4 |
Operating speed (open) *5 sec | 7.0±0.5 |
Operating speed (close) *5 sec | 7.0±0.5 |
Weight kg | 310 |
Height dimension (A) mm | 1,530 |
Center-to-flange dimension (B) mm | 380 |
*1 Leak rate does not include permeation in O-ring. External leak during opening and closing is not regulated in the case of O-ring shaft seal feedthrough.
*2 Do not open and close during bakeout.
*3 See instruction manual for detail.
*4 Conductance is based on molecular flow at 20℃ (68F) air.
*5 Adjust operation speed to make its value equal to specified value by using a speed controller.