Fundamentals of High-Speed Spectroscopic Ellipsometer

Features of High-Speed Spectroscopic Ellipsometer UNECS.

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High-Speed Spectroscopic Ellipsometer UNECS series.

ULVAC's high-speed spectroscopic ellipsometer (UNECS series) measures film thickness and refractive index of thin films quickly and accurately. It adopts a unique measurement method and realizes high-speed measurement and compact size. We offer a wide range of products, from unique portable types to automatic stage types, and built-in types that can be installed into equipment for vacuum environments.

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■High speed measurement.
The unique measurement method without a rotating mechanism enables high-speed measurement of up to 20 ms at the fastest.
■Visible Spectral Range.
In addition to the standard type (530 nm -750 nm), a visible spectral type (380 nm -760 nm) has been added to the wavelength range to support a wide range of applications.
■Compact sensor unit.
The sensor unit consists of only an optical element without a rotating mechanism. It is very light and compact and does not require regular maintenance.
■ Wide range of product lineups.
It can be used for a variety of applications, including a unique portable type, a manual/automatic stage type, a large substrate type, and a built-in type for atmosphere /vacuum environments.


Type:Portable.

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Model
(Stage type)
Wavelength Range(nm) Spot Size(mm) Z Forcus Additional Function
530-750 380-760 1 0.3 manual automatic High-precision
mapping
2000 points
3D Display
UNECS-
Portable
(fixed type)
- - - - -
UNECS-
Portable-030
(fixed type)
- - - - -
UNECS-
PortableW
(fixed type)
- - - - -
UNECS-
PortableW-300
(fixed type)
- - - - -

Type:Manual Stage.
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Model
(ステージタイプ)
Wavelength Range(nm) Spot Size(mm) Z Forcus Additional Function
530-750 380-760 1 0.3 manual automatic High-precision
mapping
2000 points
3D Display
UNECS-1500M
(manual Φ150mm)
- - - - -
UNECS-1500M-030
(manual Φ150mm)
- - - - -
UNECS-1500MW
(manual Φ150mm)
- - - - -
UNECS-1500MW-030
(manual Φ150mm)
- - - - -

Type:Automatic Stage.
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Model
(Stage type)
Wavelength Range(nm) Spot Size(mm) Z Forcus Additional Function
530-750 380-760 1 0.3 manual automatic High-precision
mapping
2000 points
3D Display
UNECS-1500A
(automatic Φ150mm)
- - -
UNECS-1500A-030
(automatic Φ150mm)
- - -
UNECS-1500AW
(automatic Φ150mm)
- - -
UNECS-1500AW-030
(automatic Φ150mm)
- - -
UNECS-2000A
(automatic Φ200mm)
- - -
UNECS-2000A-030
(automatic Φ200mm)
- - -
UNECS-2000AW
(automatic Φ200mm)
- - -
UNECS-2000AW-030
(automatic Φ200mm)
- - -
UNECS-3000A
(automatic Φ300mm)
- - -
UNECS-3000A-030
(automatic Φ300mm)
- - -
UNECS-3000AW
(automatic Φ300mm)
- - -
UNECS-3000AW-030
(automatic Φ300mm)
- - -

Type:Built-in.
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Model Applications Wavelength Range(nm) Spot Size(mm)
Atmosphere vacuum 530-750 380-760 1 0.3
UNECS-1M - - -
UNECS-1M-030 - - -
UNECS-1MW - - -
UNECS-1MW-030 - - -
UNECS-1MV - - -
UNECS-1MVW - - -

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  • Portable.
    UNECS-Portable measurement unit weight is only 2.2kg and is a portable type that can be carried.

  • High-speed Measurement.
    The high-speed measurement is up to 20ms, enabling quick measurement and analysis.

  • Wavelength selection.
    Standard type 530 ~ 750 nm and visible spectral type 380 ~ 760 nm are available.

  • Spot size selection.
    It is selectable from Φ1 mm or Φ 0.3 mm.

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  • Manual stage.
    UNECS-1500M locates measurement points easily by the Φ 150 mm R-θ stage that has excellent operability.

  • High-speed Measurement.
    The high-speed measurement is up to 20ms, enabling quick measurement and analysis.

  • Wavelength selection.
    Standard type 530 ~ 750 nm and visible spectral type 380 ~ 760 nm are available.

  • Spot size selection.
    It is selectable from Φ1 mm or Φ 0.3 mm.

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■Measurement analysis.
Simple configuration for easy measurement and analysis.
Instant analysis and display of measurement and fitting results.


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  • For 150-300mm.
    3 models are available for φ150, 200 and 300mm samples.

  • Automatic stage and Auto Focus.
    The automatic stage and auto focus function quickly and automatically measure the film thickness distribution of the substrate surface and display the result in a color map.

  • High-speed Measurement.
    The high-speed measurement is up to 20ms, enabling quick measurement and analysis.

  • Wavelength selection.
    Standard type 530 ~ 750 nm and visible spectral type 380 ~ 760 nm are available.

  • Spot size selection.
    It is selectable from Φ1 mm or Φ 0.3 mm.

■Measurement analysis.
It is equipped with R-θ automatic stage. Automatic mapping measurement.
When a substrate is set and the start button is pressed, it automatically detects from auto focus (automatic height adjustment) →specified coordinates measurement→ fitting analysis →substrate unloading.


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The software is simple and easy to use, and anyone can perform highly accurate distribution measurements.

  • Measurement coordinates can be entered in two ways: R-Θ (Radius and Angle) and X, Y (back and forth and right and left). (Up to 200 points)
  • The measurement results are displayed in real time.
  • The measurement result (distribution graphs in the wavelength range of ψ psi and Δ delta) is displayed in real time. It can be re-analyzed later.

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  • Built-in
    UNECS-1M, the light weight and compact sensor unit, can be integrated into various equipment such as film forming equipment.

  • High-speed Measurement.
    The high-speed measurement is up to 20ms, enabling quick measurement and analysis.

  • Wavelength selection.
    Standard type 530 ~ 750 nm and visible spectral type 380 ~ 760 nm are available.

  • Spot size selection.
    It is selectable from Φ1 mm or Φ 0.3 mm.

  • Vacuum type.
    In addition to an atmosphere type, a vacuum type is also available for vacuum environments.

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Measurement Repeatability.

High-speed measurement and excellent measurement repeatability.

Measurement is fast, but the data reliability does not decrease. Compared to similar products ( of other companies), much more stable repeatability is obtained.

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Measurement Film thickness (nm) Refractive index (633 nm)
1 205.6 1.459
2 205.7 1.459
3 205.5 1.458
4 205.6 1.459
5 205.5 1.459
6 205.6 1.459
7 205.6 1.459
8 205.7 1.458
9 205.6 1.459
10 205.6 1.458
Average value 205.6 1.459
Maximum value 205.7 1.459
Minimum value 205.5 1.458
Standard deviation 0.050 0.0003
Standard deviation (%) 0.02% 0.02%

■Auto Mapping Measurement.
Film thickness distribution can be evaluated in a short time by high-speed mapping measurement.
Measurement coordinates can be easily specified in X, Y mode, or R-θ mode.


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Material Table File.

The material table file that contains the optical constants of the film and substrate is open to the public and the user can freely add and edit it.Constructing data close to actual film quality enables more reliable analysis.

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  • Users can freely add and edit the material table file that contains the optical constants (refractive index and extinction coefficient) of each material.
  • ・The literature values of the major materials are stored in the library in advance.If other materials or unknown materials are evaluated, or if the analysis is not successful using the literature values, users can easily edit or add the file contents based on the actual measured data, which enables highly reliable analysis.
  • Since many material data files are not open to the public (users cannot edit), the users need to ask the manufacturer to edit and analyze them, so it takes time. It is usually a service for a fee. Our material data file, which is open to the public, solves the inconvenient situation in research and development of unknown materials.

Fundamentals of High-Speed Spectroscopic Ellipsometer

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