Large Capacity DC Power Supply

DC-20-AM

ULVAC

The DC-10/DC-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.

Features

Leight-weight/ Space-saving
Light-weight and space-saving design with excellent installation flexibility.
Selectable output voltage range
We feature a lineup with 800V specifications in addition 1000V specification.
Extensive arc handling
Extensive arc control methods familiar with plasma.
Requires no cooling water
Forced air cooling, require cooling water.
Can be equipped with a high-speed arc interruption circuit
Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option.
Can be equipped with a flexible parallel operation function
DC-10, DC-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12 units to work together in parallel operation. (240kW max)

Applications

Flat panel display sputtering
Semiconductor sputtering
Touch panel sputtering
Industrial coating sputtering

Specifications

Model		DC-10-AM	DC-10-H-AM	DC-10-4-AM	DC-20-AM	DC-20-H-AM	DC-20-4-AM
Input specification	Rated input voltage	3-Phase 187 to 229VAC		3-Phase AC342 to 440V	3-Phase 187 to 229VAC		3-Phase AC342 to 440V
	Input capacity	13.5kVA or less			25kVA or less
Output specification	Maximum rated power	10kW			20kW
	Rated current	25A	18A	25A	50A	40A	50A
	Rated voltage	-800V	-1000V	-800V	-800V	-1000V	-800V
	Ignition voltage	-1500V
	Abnormal discharge control	Shutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected
Control	Control method	Constant power control (P control)/constant current control (I control)/constant voltage control (V control)
	Control precision	Constant power control (P Control)：±0.5% or less of the rated output or ±1％ of the set value, whichever is larger. Constant current control (I Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger. Constant voltage control (V Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger.
	Control warranty scope	Constant power control, 10 to 100％ of rated power value
	Extenal interface	analog/digital,RS-232C or 485
Parallel operation		Up to 12units can be controlled by master/slave communication
Cooling method		Forced air-cooling
Dimension　W×D×H		483×630×133mm (excluding protrusions)
Weight		29kg			36kg
Applicable standard		CE/ SEMI F47/ RoHS

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Features

Leight-weight/ Space-saving
Light-weight and space-saving design with excellent installation flexibility.

Selectable output voltage range
We feature a lineup with 800V specifications in addition 1000V specification.

Extensive arc handling
Extensive arc control methods familiar with plasma.

Requires no cooling water
Forced air cooling, require cooling water.

Can be equipped with a high-speed arc interruption circuit
Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option.

Can be equipped with a flexible parallel operation function
DC-10, DC-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12 units to work together in parallel operation. (240kW max)

Specifications

Model		DC-10-AM	DC-10-H-AM	DC-10-4-AM	DC-20-AM	DC-20-H-AM	DC-20-4-AM
Input specification	Rated input voltage	3-Phase 187 to 229VAC		3-Phase AC342 to 440V	3-Phase 187 to 229VAC		3-Phase AC342 to 440V
	Input capacity	13.5kVA or less			25kVA or less
Output specification	Maximum rated power	10kW			20kW
	Rated current	25A	18A	25A	50A	40A	50A
	Rated voltage	-800V	-1000V	-800V	-800V	-1000V	-800V
	Ignition voltage	-1500V
	Abnormal discharge control	Shutoff by inverter stop or high-speed arc shutoff circuit*1 when abnormal discharge is detected
Control	Control method	Constant power control (P control)/constant current control (I control)/constant voltage control (V control)
	Control precision	Constant power control (P Control)：±0.5% or less of the rated output or ±1％ of the set value, whichever is larger. Constant current control (I Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger. Constant voltage control (V Control)：±1％ or less of the rated output or ±2％ of the set value, whichever is larger.
	Control warranty scope	Constant power control, 10 to 100％ of rated power value
	Extenal interface	analog/digital,RS-232C or 485
Parallel operation		Up to 12units can be controlled by master/slave communication
Cooling method		Forced air-cooling
Dimension　W×D×H		483×630×133mm (excluding protrusions)
Weight		29kg			36kg
Applicable standard		CE/ SEMI F47/ RoHS