DC-2|Small Capacity DC Power Supply|DC Power Supply|Products|ULVAC SHOWCASE

Small Capacity DC Power Supply

DC-2

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The DC-2/DC-4 are 2 kW/4 kW DC power generators for sputtering.
Repeatability is excellent because of high control accuracy.

Features

  • High control precision
    High precision of ±1% of set value even in a low power region of below 10%.</li
  • Wide accuracy guarantee
    Guarantee the wide range power control from 1 to 100%.
  • Light-weight/space-saving
    Light-weight and space-saving design with excellent installation flexibility.
  • Requires no cooling water
    Forced air cooling, requires no cooling water.
  • High reliability
    Our accumulated knowledge as an equipment manufacturer has been reflected in the design.

Applications

  • Sputtering equipment for R&D
  • BIAS power supply of sputtering equipment

Specifications

Model DC-2 DC-4
Input specification Rated input voltage AC208V/220V
Input voltage fluctuation range 180 to 242VAC
Phase, frequency Three phase, 50/60Hz
Input capacity 3.5kVA 6.2kVA
Output specification Maximum rated power 2kW 4Kw
Rated current 5A 10A
Rated voltage 800V
Output polarity Negative polarity
Abnormal discharge control Shutoff by inverter stop or stop by resonance
Control Control method Constant power control (P control) / Constant current control (I control) /Constant voltage control (V control)
Control precision ±1% of set point (In our prescriptive resistance value.)
Control compensation range Constant power control, 1 to 100% of rated power value
Parallel operation Nothing
Interface Analog/Degital,RS-232C or RS-485
Cooling method Forced air-cooling
Dimension(W×D×H) 241mm×610mm×133mm(excluding protrusions)
Weight 15kg
Applicable standard CE/SEMI F47/RoHS

Ambient operating temperature 5℃ ~ 40℃(no condensation)
Operating environment: Avoid direct sunlight, heat, dust, vibration, and without corrosive gas.

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