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Small Capacity DC Power Supply
DCS0052B
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As the basic performance is a matter of course, DCS series provides superior cost performance and is used in various applications.
Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.
Combination use of the arc suppression unit, A2K, is effective well in reactive sputtering.
Features
- Improvement in output regulation (Operates in 1％ to 100％ of rated)
- Wide range of output without tap changing
- Two types of arc detection function are equipped
- Countermeasure for extraneous noise by isolation (option)
- Selectable from three types of operation mode (power / current / voltage)
- Floating output up to +100V
Applications
- For Al, Ni and other metal sputtering processes
Specifications
| Model | DCS0052B | |
| Maximum output power | 500W | |
| Output range | Power | 5W～500W |
| Voltage | 80V～800V | |
| Current | 0.0012A～1.25A | |
| External dimensions (WDH) mm | 240 x 450 x 99 | |
| Weight | 9kg | |
