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Deposition-Controller
CRTM-R1 Series
CRTM-R1
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New Product
ULVAC has developed the new quartz crystal deposition controllers based on our longtime experience and technologies. Contributes to improved quality and reliability in vapor deposition processes.
Features
- Excellent rate stability and resolution make it suitable for low rate control.
- Ability value (CI value) measurement function improves crystal anomaly detection.
- Simultaneous vapor deposition control of up to 8 sources is possible. (add option)
- Communication method supports Ethernet and RS-232C.
- Various log data can be saved. Data can be transferred to USB and analyzed on a PC.
Apprication
Thickness and rate control for vapor deposition of metal thin film or optical thin film
Specifications
| Frequency | Measurement range | 4.00 to 3.00MHz @4MHz 5.00 to 3.50MHz @5MHz 6.00 to 4.50MHz @6MHz |
| Measurement resolution | 1mHz | |
| Display resolution | 1mHz | |
| Deposition rate | Measurement range *1 | 0.000 to 999.9Å/s (0 to 99.99nm/s) |
| Measurement resolution *2 | 0.0028Å/s @4MHz 0.0018Å/s @5MHz 0.0012Å/s @6MHz |
|
| Display resolution *1 | 0.001Å/s | |
| Film thickness | Measurement range *1 | 0.000 to 9999kÅ (0 to 999.9μm) |
| Measurement resolution *2 | 0.0028Å @4MHz 0.0018Å @5MHz 0.0012Å @6MHz |
|
| Display resolution *1 | 0.001kÅ | |
| Sensor frequency | 4MHz, 5MHz, 6MHz | |
| Number of sensors that can be installed (single) | 2 (Optionally a set of 2 sensors can be added, up to 8 sensors.) | |
| Number of sensors that can be installed (multi) | 2 (Optionally a set of 2 sensors can be added, up to 8 sensors.) | |
| Sampling rate | 100msec | |
| Number of deposition programs | 999 | |
| Number of Process programs | 99 | |
| Digital input point | 14 (Optionally a set of 14 points can be added, up to 56 points.) | |
| Digital output point | 8 (Optionally a set of 8 points can be added, up to 32 points.) | |
| Analog output point | 2 (Optionally a set of 2 points can be added, up to 16 points.) | |
| Analog output range | -10 to +10V | |
| Communication method | Ether (1000BASE-T/100BASE-TX/10BASE-T) RS-232C USB (Type-B, for setting with dedicated software) |
|
| External dimensions (W x D x H) | CRTM-R1: Approx. 480 x 320 x 130mm CTM(-D): Approx. 80 x 152 x 53 mm |
|
| Weight (kg) | CRTM-R1: 5.3kg (up to 5.8kg with options installed) CTM(-D): 0.6 kg |
|
| Utility | AC 100 to 240V±10%, 50/60Hz | |
| Maximum Power Consumption | 150W | |
| Suitable Fuse | 250V 2.5A (2pcs of 5 x 20mm) | |
| IP Protection Class | IP20 | |
| Overvoltage Category | CAT.Ⅱ | |
| Altitude | 2000m or less above sea level | |
| Contamination level | 2 | |
| Operating environment | Temperature 5 to 40℃ Humidity 20 to 85%RH (no condensation) |
|
| Storage environment | Temperature -10 to 60℃ Humidity 20 to 85%RH (non-energizing, no condensation) |
|
| Warm-up time | Approx. 30 minutes | |
| Applicable standard | CE | |
* 1: This is the value when Tooling = 100 and Density = 1
* 2: This is the value that is converted frequency resolution with Tooling = 100 and Density = 1.
Option introduction
When using CRTM-R1, Requires options such as CTM(-D) and cables, CRTS sensors and feedthroughs.
Rate comparison between conventional CRTM and new CRTM-R1
CRTM-R1 is stable with low noise fluctuations.
【 New CRTM-R1 】
【 Conventional CRTM 】 
該非判定結果報告書 Download
SDS Download
Accessories and Consumables
Deposition Controller 【Quartz Crystal】
Quartz Crystal UCR-5MAG-12
Quartz Crystal UCR-5MAU-12
Quartz Crystal UCR-4MAG-12
Deposition Controller 【CTM and CTM Outer Cable Set】＊Only for CRTM-R1
CTM,CTM outer cable (Only for CRTM-R1)
CTM-D,CTM outer cable(Only for CRTM-R1)
Deposition Controller 【CTM and CTM Outer Cable Set】＊Only for CRTM-R1-EL
CTM-EL,CTM outer cable(Only for CRTM-R1-EL)
CTM-EL-D,CTM outer cable(Only for CRTM-R1-EL)
