Deposition-Controller
CRTM Series
CRTM-6000G
アルバック
The CRTM-6000G is a deposition controller with excellent cost / performance features.
Unit offer a wide depostion control range for single as well as multilayer films.
Unit offer a wide depostion control range for single as well as multilayer films.
Features
- Two sensors can be switched for deposition control.
(The simultaneous measurement cannot be done. It is a switch type.) - Low rate deposition process control is possible with high resolution of film thickness.
- Excellent response is obtained with a sampling rate of 125 ms.
- Up to 99 deposition programs can be stored with battery backup.
- Memory of the controller can record up to 30 process sequences.
- RS232C interface is included as standard. Control from a PC is therefore simple.
- The 12ch digital input/output signals is programmable.
- The 3ch analog output signals (Power, Rate, Thickness) is programmable.
- Up to 3 steps can be input for pre-heating and rate control for more precise control.
Applications
- Film thickness and deposition rate control during evaporation.
Specifications
Film thickness/rate resolution | 0.041 A (5 MHz) 0.029 A (6 MHz) |
Film thickness display range / display resolution/td> | 0.001kA : 0 to 9.999kA 0.01kA : 10 to 99.99kA 0.1kA : 100 to 999.9kA |
Deposition rate display range / display resolution | 0.001A/s : 0 to 9.999A/s 0.01A/s : 10 to 99.99A/s 0.1A/s : 100 to 999.9A/s |
Supported sensor frequency | 5MHz, 6MHz |
Number of sensors that can be attached |
Single sensor::2(The simultaneous measurement cannot be done. It is a switch type. ) |
Sampling rate | 125ms |
Number of multilayer film layers supported | 99 layers |
Number of deposition programs | 99 |
Digital I/O | Input : 12channels programmable Output : 12channels programmable |
Analog outputs | 3ch programmable |
External dimensions W×D×H | 240mm x 350mm x 99mm |
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