CRTM-6000G|CRTM Series|Deposition-Controller|Deposition Controller|Products|ULVAC SHOWCASE

Deposition-Controller

CRTM Series

CRTM-6000G

アルバック

The CRTM-6000G is a deposition controller with excellent cost / performance features.
Unit offer a wide depostion control range for single as well as multilayer films.

Features

  • Two sensors can be switched for deposition control.
    (The simultaneous measurement cannot be done. It is a switch type.)
  • Low rate deposition process control is possible with high resolution of film thickness.
  • Excellent response is obtained with a sampling rate of 125 ms.
  • Up to 99 deposition programs can be stored with battery backup.
  • Memory of the controller can record up to 30 process sequences.
  • RS232C interface is included as standard. Control from a PC is therefore simple.
  • The 12ch digital input/output signals is programmable.
  • The 3ch analog output signals (Power, Rate, Thickness) is programmable.
  • Up to 3 steps can be input for pre-heating and rate control for more precise control.

Applications

  • Film thickness and deposition rate control during evaporation.

Specifications

Film thickness/rate resolution 0.041 A (5 MHz)
0.029 A (6 MHz)
Film thickness display range / display resolution/td> 0.001kA : 0 to 9.999kA
0.01kA : 10 to 99.99kA
0.1kA : 100 to 999.9kA
Deposition rate display range / display resolution 0.001A/s : 0 to 9.999A/s
0.01A/s : 10 to 99.99A/s
0.1A/s : 100 to 999.9A/s
Supported sensor frequency 5MHz, 6MHz
Number of sensors that can be attached

Single sensor::2(The simultaneous measurement cannot be done. It is a switch type. )
Multi sensor:1

Sampling rate 125ms
Number of multilayer film layers supported 99 layers
Number of deposition programs 99
Digital I/O Input : 12channels programmable
Output : 12channels programmable
Analog outputs 3ch programmable
External dimensions W×D×H 240mm x 350mm x 99mm

該非判定結果報告書 Download

SDS Download

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept