Deposition Controller

CRTM Series

CRTM-6000G

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The CRTM-6000G is a deposition controller with excellent cost / performance features.
Unit offer a wide depostion control range for single as well as multilayer films.

Features

  • Two sensors can be switched for deposition control.
    (The simultaneous measurement cannot be done. It is a switch type.)
  • Low rate deposition process control is possible with high resolution of film thickness.
  • Excellent response is obtained with a sampling rate of 125 ms.
  • Up to 99 deposition programs can be stored with battery backup.
  • Memory of the controller can record up to 30 process sequences.
  • RS232C interface is included as standard. Control from a PC is therefore simple.
  • The 12ch digital input/output signals is programmable.
  • The 3ch analog output signals (Power, Rate, Thickness) is programmable.
  • Up to 3 steps can be input for pre-heating and rate control for more precise control.

Applications

  • Film thickness and deposition rate control during evaporation.

Specifications

Film thickness/rate resolution 0.041 A (5 MHz)
0.029 A (6 MHz)
Film thickness display range / display resolution/td> 0.001kA : 0 to 9.999kA
0.01kA : 10 to 99.99kA
0.1kA : 100 to 999.9kA
Deposition rate display range / display resolution 0.001A/s : 0 to 9.999A/s
0.01A/s : 10 to 99.99A/s
0.1A/s : 100 to 999.9A/s
Supported sensor frequency 5MHz, 6MHz
Number of sensors that can be attached

Single sensor::2(The simultaneous measurement cannot be done. It is a switch type. )
Multi sensor:1

Sampling rate 125ms
Number of multilayer film layers supported 99 layers
Number of deposition programs 99
Digital I/O Input : 12channels programmable
Output : 12channels programmable
Analog outputs 3ch programmable
External dimensions W×D×H 240mm x 350mm x 99mm

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