Unit offer a wide depostion control range for single as well as multilayer films.
- Two sensors can be switched for deposition control.
(The simultaneous measurement cannot be done. It is a switch type.)
- Low rate deposition process control is possible with high resolution of film thickness.
- Excellent response is obtained with a sampling rate of 125 ms.
- Up to 99 deposition programs can be stored with battery backup.
- Memory of the controller can record up to 30 process sequences.
- RS232C interface is included as standard. Control from a PC is therefore simple.
- The 12ch digital input/output signals is programmable.
- The 3ch analog output signals (Power, Rate, Thickness) is programmable.
- Up to 3 steps can be input for pre-heating and rate control for more precise control.
- Film thickness and deposition rate control during evaporation.
|Film thickness/rate resolution||0.041 A (5 MHz)
0.029 A (6 MHz)
|Film thickness display range / display resolution/td>||0.001kA : 0 to 9.999kA
0.01kA : 10 to 99.99kA
0.1kA : 100 to 999.9kA
|Deposition rate display range / display resolution||0.001A/s : 0 to 9.999A/s
0.01A/s : 10 to 99.99A/s
0.1A/s : 100 to 999.9A/s
|Supported sensor frequency||5MHz, 6MHz|
|Number of sensors that can be attached||
Single sensor:：2(The simultaneous measurement cannot be done. It is a switch type. )
|Number of multilayer film layers supported||99 layers|
|Number of deposition programs||99|
|Digital I/O||Input : 12channels programmable
Output : 12channels programmable
|Analog outputs||3ch programmable|
|External dimensions W×D×H||240mm x 350mm x 99mm|
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