Quartz Crystal



Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.


  • Specializes in organic material films. It is suitable for use while switching with a multi-sensor.
  • Excellent temperature characteristics during film formation due to the least frequency change caused by radiant heat in the class.
  • The dedicated case corresponding to multi-sensor CRTS-12NS makes it easy not to only take out quarts crystal one by one, but also replace 12 pcs of quartz crystals without any tools (patent pending)


  • Metal Film
  • Optical Film


Model UCR-4MAG-12 UCR-5MAU-12 UCR-5MAG12
Application Organic Material Film
(OLED Panel)
Metal Film, Optical Film
Frequency 4MHz 5MHz
Diameter φ12.4
Electrode Ag Au Ag
Deposition Controller
CRTM-9200 CRTM-6000G/CRTM-9200

Single-Sensor (CRTS-4, 6, 0, 4U, 6U)
Multi-(CRTS-12NS, M6)
Electrode Surface Mirror Finish Standard
Package Multi-Sensor Friendly Case (12pcs)


"User registration (free)" is required to download catalogs, drawings, and I/O data. If you have not registered as a user, please register from the user registration page. If you have already registered as a user, please log in here.

Inquiry about this product

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept