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Quartz Crystal
UCR-5MAU-12
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Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.
Features
- Specializes in organic material films. It is suitable for use while switching with a multi-sensor.
- Excellent temperature characteristics during film formation due to the least frequency change caused by radiant heat in the class.
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The dedicated case corresponding to multi-sensor CRTS-12NS makes it easy not to only take out quarts crystal one by one, but also replace 12 pcs of quartz crystals without any tools (Japanese Patent No. 6802937)
Applications
- Metal Film
- Optical Film
Specifications
| Model | UCR-4MAG-12 | UCR-5MAU-12 | UCR-5MAG-12 | UCR-6MAU-12 |
| Surface pattern |  |
 |
 |
 |
| Frequency | 4MHz | 5MHz | 5MHz | 6MHz |
| Electrode | Ag | Au | Ag | Au |
| Surface finish | Mirror Finish | Standard | ||
| Diameter | φ12.4mm | φ14mm | ||
| Controller | CRTM-9200 CRTM-R1（ーEL） |
CRTM Series | ||
| Sensor | CRTS Series | 6MHz Sensor | ||
| Recommended Use |
Organic, Metal, Optical Film deposition |
Metal, Optical Film deposition | ||
| Case | Carousel type case (12pcs) | |||
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