Option

Quartz Crystal

UCR-5MAU-12

アルバック

Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.

Features

  • Specializes in organic material films. It is suitable for use while switching with a multi-sensor.
  • Excellent temperature characteristics during film formation due to the least frequency change caused by radiant heat in the class.
  • The dedicated case corresponding to multi-sensor CRTS-12NS makes it easy not to only take out quarts crystal one by one, but also replace 12 pcs of quartz crystals without any tools (patent pending)

Applications

  • Metal Film
  • Optical Film

Specifications

Model UCR-4MAG-12 UCR-5MAU-12 UCR-5MAG12
Application Organic Material Film
(OLED Panel)
Metal Film, Optical Film
Frequency 4MHz 5MHz
Diameter φ12.4
Electrode Ag Au Ag
Supported
Deposition Controller
CRTM-9200 CRTM-6000G/CRTM-9200

Sensor
Single-Sensor (CRTS-4, 6, 0, 4U, 6U)
Multi-(CRTS-12NS, M6)
Electrode Surface Mirror Finish Standard
Package Multi-Sensor Friendly Case (12pcs)

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