Option

Quartz Crystal

UCR-5MAU-12

アルバック

Crystal quartz plate・UCR Series for sensors for crystal oscillation type deposition controller of ULVAC.

Features

  • Specializes in organic material films. It is suitable for use while switching with a multi-sensor.
  • Excellent temperature characteristics during film formation due to the least frequency change caused by radiant heat in the class.
  • The dedicated case corresponding to multi-sensor CRTS-12NS makes it easy not to only take out quarts crystal one by one, but also replace 12 pcs of quartz crystals without any tools (Japanese Patent No. 6802937)

Applications

  • Metal Film
  • Optical Film

Specifications

Model UCR-4MAG-12 UCR-5MAU-12 UCR-5MAG-12 UCR-6MAU-12
Surface pattern  UCR4MAG12_pattern.png  UCR5MAU12_pattern.png  UCR5MAG12_pattern.png  UCR6MAU12_pattern.png
Frequency 4MHz 5MHz 5MHz 6MHz
Electrode Ag Au Ag Au
Surface finish Mirror Finish Standard
Diameter φ12.4mm φ14mm
Controller CRTM-9200
CRTM-R1(ーEL)
CRTM Series
Sensor CRTS Series 6MHz Sensor
Recommended
Use
Organic, Metal,
Optical Film deposition
Metal, Optical Film deposition
Case Carousel type case (12pcs)

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