HPS-1000N-100|HPS Series|EB Power Supply|EB Source・EB Power Supply|Products|ULVAC SHOWCASE

EB Power Supply

HPS Series

HPS-1000N-100

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Series of power generator that support electron beam evaporation sources and feature improvements in circuit stability and performance based on technologies ULVAC have accumulated over many years and our proven track record.
When used in combination with the EGC-10GS EB Gun Controller, both EG guns for optical films and EB guns for metal films can be supported.

Features

  • Requires no cooling water
    Forced air-cooling, requires no cooling water
  • High reliability
    Our accumulated knowledge as an equipment manufacturer has been reflected in the design
  • Easy to use
    The LCD touch panel used for the control panel improves ease of use
  • Sweep waveform variations
    Many beam scan forms can be created on the operating screen
  • High-speed arc shutoff function
    Configured with a circuit that minimizes decreases in deposition rate by high-speed arc shutoff
  • Low level arc control function (option for optical applications) Controls minute arcs that occur in optical applications to allow stable deposition

Applications

  • Vacuum evaporation for metal films

Specifications

Model HPS-1000N-100 HPS-1000N-200
Input specification Input voltage Three phase, AC190~231V
Input capacity 14kVA 15kVA
Output specification Rated output power 10kW
Voltage -4k~-10kV
Ripple rate 2%p-p or less (at rated power)
Beam current 0~1000mA
Cooling method Forced air-cooling
Dimensions W×D×H 494×701×712mm
Weight 120kg 145kg
Applicable Standard CE

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Instruction Manuals and Specifications Download

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