EB Source for Metal Film

EGL Series

EGL-35M

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Electron beam evaporation source EGL-35M is designed to improve performance and reliability based on ULVAC's many years of technical experience and achievements.
EGL-35M has two crucibles with a capacity of 40 cc(maximum input power of 10 kW)and two crucibles with a capacity of 10 cc(maximum input power of 6 kW)(standard specification), which enables the arbitary multilayer deposition.

Features

  • Multi-layer film deposition is possible by adopting a 4-point switching hearth with a capacity of 40 cc and 10 cc.
  • The electron beam is deflected by the electromagnetic field, the effect of secondary electrons on the deposition target is extremely small.
  • By scanning the beam spot in the X-axis and Y-axis directions even with a sublimable substance, the partial digging phenomenon can be eliminated and the entire crucible can be evaporated smoothly.
  • The electron beam is deflected 270°, so it is not exposed to the above from the vaporized material and the filament has a long life.
  • Since the emitter assembly can be easily attached and detached, it is easy to replace the filament, insulator, etc.
  • The hearth position detection mechanism is installed as an option and hearth rotation can be automated.

Specifications

Acceleration voltage -4kV~-10kV DC
Emission current(MAX) 1.0A MAX (at-10kV)
Maximum input power 10kW (at 40cc crucible), 6kW (at 10cc crucible)
X-axis deflection coil -0.4A~-3.5A MAX -18V DC
About 2.6Ω(at 20℃)
Y-axis deflection coil 0A~±1.2A MAX ±12V DC
About 5.8Ω(at 20℃)
Filament 0V~12V AC MAX 40A
Crucible Quantity 4
Volume 40cc ×2, 10cc×2 (For standard specifications)
Size 50Φ×41Φ×25H, 32Φ×24Φ×15H
Beam deflection angle 270°
Effective evaporation angle 90° or more
deposition rate 1.6μm/min or more(A|8kW、250H directly above teh hearth)
Cooling water volume Hearth 10L/min or more 0.7Mpa (max)
Coil 2L/min or more 0.7Mpa (max)
Water temperature 15℃~25℃
Hearth position posting mechanism Contact quantity:NO contact 4sets
(Option) Volume:MAX 1A、50V DC
External dimensions 170W×240D×156H Excluding protrusion
Weight About 18kg
Applicable power supply HPS-510S, HPS-1000N, HPS-1600F

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