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EB Source for Metal Film
EGL Series
EGL-35M
ULVAC
Electron beam evaporation source EGL-35M is designed to improve performance and reliability based on ULVAC's many years of technical experience and achievements.
EGL-35M has two crucibles with a capacity of 40 cc（maximum input power of 10 kW）and two crucibles with a capacity of 10 cc（maximum input power of 6 kW）(standard specification）, which enables the arbitary multilayer deposition.
EGL-35M has two crucibles with a capacity of 40 cc（maximum input power of 10 kW）and two crucibles with a capacity of 10 cc（maximum input power of 6 kW）(standard specification）, which enables the arbitary multilayer deposition.
Features
- Multi-layer film deposition is possible by adopting a 4-point switching hearth with a capacity of 40 cc and 10 cc.
- The electron beam is deflected by the electromagnetic field, the effect of secondary electrons on the deposition target is extremely small.
- By scanning the beam spot in the X-axis and Y-axis directions even with a sublimable substance, the partial digging phenomenon can be eliminated and the entire crucible can be evaporated smoothly.
- The electron beam is deflected 270°, so it is not exposed to the above from the vaporized material and the filament has a long life.
- Since the emitter assembly can be easily attached and detached, it is easy to replace the filament, insulator, etc.
- The hearth position detection mechanism is installed as an option and hearth rotation can be automated.
Specifications
| Acceleration voltage | -4kV～-10kV DC | |
| Emission current（MAX） | 1.0A MAX (at-10kV) | |
| Maximum input power | 10kW (at 40cc crucible), 6kW (at 10cc crucible) | |
| X-axis deflection coil | -0.4A～-3.5A MAX -18V DC About 2.6Ω（at 20℃） |
|
| Y-axis deflection coil | 0A～±1.2A MAX ±12V DC About 5.8Ω（at 20℃） |
|
| Filament | 0V～12V AC MAX 40A | |
| Crucible | Quantity | 4 |
| Volume | 40cc ×2, 10cc×2 （For standard specifications） | |
| Size | 50Φ×41Φ×25H, 32Φ×24Φ×15H | |
| Beam deflection angle | 270° | |
| Effective evaporation angle | 90° or more | |
| deposition rate | 1.6μm/min or more（A|8kW、250H directly above teh hearth) | |
| Cooling water volume | Hearth | 10L/min or more 0.7Mpa (max) |
| Coil | 2L/min or more 0.7Mpa (max) | |
| Water temperature | 15℃～25℃ | |
| Hearth position posting mechanism | Contact quantity：NO contact 4sets | |
| (Option) | Volume：MAX 1A、50V DC | |
| External dimensions | 170W×240D×156H Excluding protrusion | |
| Weight | About 18kg | |
| Applicable power supply | HPS-510S, HPS-1000N, HPS-1600F | |
