Desorption Gas Analyzer
Temperature-Programmed Desorption Gas Analyzer
TDS-M202R
ULVAC EQUIPMENT SALES
Print/Download
For more information on ULVAC products, purchase, and/or consideration, click here.
Reach a target temperature for a short time, Mass analysis of up to 200amu is available
This system can measure the gas desorbed from a sample with a quadro-pole mass filter after heating up to a target temperature.
This system can measure the gas desorbed from a sample with a quadro-pole mass filter after heating up to a target temperature.
Features
- Capable of mass analysis measurement in a high vacuum of 10-5Pa range.
- A wide range of heating setting from high speed to low speed, multistep heating and cyclic heating are available.
- With a quartz reaction tube employing cold wall method, there is almost no gas emitted by infrared lamp heating.
- method, there is almost no gas emitted by infrared lamp heating.
Applications
- Evaluation of various vacuum materials like vacuum grease and O-rings.
- Evaluation of semiconductor wafers and chips.
- Analysis of small amount of gas desorbed from alloy and ceramics etc.
Specifications
| Temperature range | RT ～ 1000℃ |
|---|---|
| Sample size | □20 × t2 (mm) |
| Atmosphere | Vacuum |
| Heating method | Paraboloidal reflected infrared tubular heating method |
| Temperature sensor | Thermocouple (JIS “K”) |
| Ultimate vacuum | The range of 10-5 Pa (after 8-hour baking) |
| Measurement range of mass amount | 1 ～ 200amu |
| Safe guard | Cooling water ? Earth leakage(ELB) |
| Sensitivity | 4A/Pa |
| Resolution | M/△M＝1M（10％ P.H.） |
