Infrared Gold Image Furnace / RTA System
Simplified Infrared Lamp Heating System
SSA series
ULVAC EQUIPMENT SALES
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Simplified system with Infrared Gold Image Furnace and a quartz chamber.
A low-cost heating system consist of an Infrared Golc Image Furnace and quartz chamber including a sample holder.
A low-cost heating system consist of an Infrared Golc Image Furnace and quartz chamber including a sample holder.
Features
- Quartz chamber is selectable from gas flow type or vacuum type. (Gas flow type is standard.)
- Gas flow type and vacuum type can be integrated as option.
- Simple input of temperature recipe into computer connected with USB
- Display temperature data on the PC monitor during heating
Applications
- Alloying of compound semiconductors
- RTA of Si, compound semiconductors
- Baking furnace for laminating materials on ceramic substrates
- Annealing furnace for glass and ceramic substrates
Specifications
| Model | SSA-E45 | SSA-E410 | SSA-P610C |
|---|---|---|---|
| Heating Method | Focused light cylindrical heating | Parallel light cylindrical heating | |
| Temperature Range | RT ～ 1400℃ | RT ～ 1200℃ | |
| Heating zone | Φ15mm×L 50mm | Φ15mm×L 100mm | Φ50mm×L 100mm |
| Soaking zone | Φ10mm×L 40mm | Φ10mm×L 80mm | Φ40mm×L 80mm |
| Heating chamber | Quartz chamber Φ30（for gas flow） | Quartz chamber Φ98（for gas flow） | |
| Sample holder | Quartz holder with boat shape | Quartz holder for 2-inch wafer | |
| Thermocouple | JIS R-type | ||
| Temperature controller | TPC5000-32-1 | TPC5000-62-1 | |
※ Heating temperature changes according to the heated sample’s infrared reflectance, absorption, heat capacity, and material.
