Print/Download
Infrared Gold Image Furnace / RTA System
High Temperature Rapid Thermal Annealing System
HT-RTA59HD
アルバック販売
Heating a small piece of sample up to 1800°C just in 10 seconds.
HT-RTA59HD is a desktop-type lamp annealing system which enables a small piece of sample to heat up to 1800°C (Ultrahigh temperature zone) just in 10 seconds with high reflection efficiency by spot focused heating.
HT-RTA59HD is a desktop-type lamp annealing system which enables a small piece of sample to heat up to 1800°C (Ultrahigh temperature zone) just in 10 seconds with high reflection efficiency by spot focused heating.
Features
- Capable of heating a small piece of sample (square 15 mm) up to 1800°C (Ultra-high temperature zone) just in 10 seconds.
- High reflection efficiency with high-power spot focused heating
- Desktop-type compact design
- Infrared lamp heating method enables clean-heating to minimize dust and gas generation
- It is available to easily input outer signal or temperature program setting from your PC and display the temperature data during heating on the monitor.
Applications
- SiC (Power device) oxide film formation to activation
- Heat treatment furnace for high-melting point material
- Sintering and baking furnace
- Local heating impact test furnace
- Crystal growth test furnace (Zone melting)
Specifications
| Temperature range | RT ～ 1800℃ |
|---|---|
| Sample dimension | square 15 × t1 (mm) |
| Heating atmosphere | Various gas flow |
| Thermocouple | JIS B Φ0.3 (W-Re is available) |
System diagram
1. For lamp cooling Air GAS INLET
2. GAS OUTLET
3. N2 GAS INLET
4. Ar GAS INLET
5. Lamp
6. Transparent quartz protective tube
7. Transparent quartz protective tube
8. Slider to move the sample into/out of the furnace (Manual operation)
Heating property
Maximum achieving temperature
The power supply : 7kW (max.)
Measurement : W-Re thermocouple
Heating atmosphere : N2 1L/min
Attainment Temperature : 2157℃（Approx 200℃/sec heating up to 2000℃）
Rapid heating control
Temperature recipe : 200℃/s holding time 5 min.
Heating atmosphere :N2 100cc/min
Sample holder : High purity carbon
Sample Susceptor : High purity carbon
Sample holder and susceptor
Utility
| Power requirements | AC 200V, single phase 8kW |
|---|---|
| Cooling water | 0.3MPa Approx 5L/min |
| Lamp cooling gas | Dry air Approx 200L/min |
| Outside dimensions (mm) | Approx W410 x D450 x H840 (excluding protrusion) |
| Weight | Approx 45kg |
Option
- Vacuum exhaust system (RP, DRY, TMP etc.)
- Gas piping system (From 2nd system)
- Cooling water circulator
- Cooling air generator system
- Handy spot welder (HS-9000)
- Handy arc welder (HA-1H)
