Automatic Type

UNECS Series

UNECS-2000A

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Automatic Stage Type with Mapping Function

UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement .

3 models are available for Φ150, 200 and 300mm samples. Auto mapping R-θ stage and auto focus function make it possible to measure film thickness of entire sample surface and dispay film thickness distribution by color map.

Features

  • High-speed Measurement:The snapshot measurement method is realized and the high-speed measurement is 20ms per point.
  • Visible Spectral Range:The spectral wavelength range can be selected. The standard type is 530nm to 750nm and the visible spectral type is 380nm~760nm.
  • Compact Sensor Unit:The sensor unit is light-weighted and very compact. It consists of an optical element that does not have any rotating mechanism. In addition, there is no need for any periodic maintenance.
  • Strong Product-line:There is a strong products line with the portable type, the manual/automatic stage type, the built-in type and the large substrate type etc.

Applications

  • Measurement for transparent or semi-transparent thin films thickness(D), reflective index(N) and extinction coefficient(K). (Oxide film, nitride film, photo-resist film, ITO film, etc.)

Specifications

Model 1500A 2000A 3000A
Wavelength Range 530 to 750nm or 380 to 760nm
Spot Size Φ1mm or Φ0.3mm
Angle of Incidence 70°
Film Thickness Repeatability 1σ = 0.1nm
Film Thickness Measurement Range 1nm~2μm
Measurment Time Sampling : 20ms to 3000ms Analyzing time : 300ms
Sample Stage Φ150mm Φ200mm Φ300mm
Maximum Automatic Measurable Points 200点 200点 2,000点
Control PC Laptop PC including analysis software
Configuration Measurement unit. Control unit. Control PC (Laptop type) and operation manual (CD).

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