Cryo Pump

Compressor Unit

C10AT

アルバック・クライオ

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

Specification

Voltage(ACV×Φ×Hz) 190~220×3×50
190~230×3×60
Power KW(50/60Hz) 1.5/1.7
Cooling method Air cool
Weight(Kg) 77

*Adsorber replacement cycle:24,000 hours

Dimensions (mm)

c10at-d_e.gif

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