Cryo Pump

Compressor Unit

C40R

アルバック・クライオ

This product is necessary to operate the cryopump.
Compressed helium gas is sent to a refrigerator, and high-temperature helium gas that is returned from the refrigerator is cooled and circulated.

Specification

Power supply(ACV×Φ×Hz) 200×3×50
220×3×60
Power KW(50/60Hz) 6.5/8.0
Cooling method Water flow rate(L/min)(20℃) 5.5
Weight(Kg) 130

*Cooling water inlet/outlet Rc 3/8

Dimensions (mm)

c40r-d_e.gif

Inquiry about this product

This website use cookies to obtain and use access data to understand the convenience and usage of customers. If you agree to use cookies, click "I Accept".
[Privacy Plicy] [Cookie Policy]

I Accept