Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


  1. Optimal for sputtering applications
  2. Argon capacity is 2 times of existing model (U10H).
  3. Extended intervals between regenerations means higher tool availability.
  4. Multiple connections (up to 3) can be made.


Pumping speeds(20℃) Nitrogen L/s 2,400
Hydrogen 3,600
Argon 2,000
Water 6,900
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum flow rate Argon Pa・L/s(Torr・L/s) 1.30×103(9.8)
Hydrogen 2.1×102(1.6)
Pumping speed Argon Pa・L(Torr・L) 2.0×108(1.5×106)
Cooldown time
(Power cycles)
min(Hz) 120/110(50/60)
Mounting flange UVG-250,10BANSI
compressor unit C15T
Weight Kg 36.0

*Maintenance interval:16,000 hours
*Moveable base is option

Dimensions (mm)


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