CRYO-U10HSP

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Optimal for sputtering applications
Argon capacity is 2 times of existing model (U10H).
Extended intervals between regenerations means higher tool availability.
Multiple connections (up to 3) can be made.

Specification

Pumping speeds(20℃)	Nitrogen	L/s	2,400
	Hydrogen		3,600
	Argon		2,000
	Water		6,900
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.30×10³(9.8)
	Hydrogen		2.1×10²(1.6)
Pumping speed	Argon	Pa・L(Torr・L)	2.0×10⁸(1.5×10⁶)
			1.2×10⁶(9.0×10³)
Cooldown time (Power cycles)	min(Hz)		120/110(50/60)
Mounting flange			UVG-250,10^BANSI
compressor unit			C15T
Weight		Kg	36.0

*Maintenance interval：16,000 hours
*Moveable base is option

Dimensions (mm)

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Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

Specification

Pumping speeds(20℃)	Nitrogen	L/s	2,400
	Hydrogen		3,600
	Argon		2,000
	Water		6,900
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.30×10³(9.8)
	Hydrogen		2.1×10²(1.6)
Pumping speed	Argon	Pa・L(Torr・L)	2.0×10⁸(1.5×10⁶)
			1.2×10⁶(9.0×10³)
Cooldown time (Power cycles)	min(Hz)		120/110(50/60)
Mounting flange			UVG-250,10^BANSI
compressor unit			C15T
Weight		Kg	36.0

*Maintenance interval：16,000 hours
*Moveable base is option