Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


  • Suitable for medium- and large-size equipments.
  • Resistant to thermal load. Suitable for various processes.


Pumping speeds(20℃) Nitrogen L/s 4,000
Hydrogen 6,000
Argon 3,300
Water 9,500
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum flow rate Argon Pa・L/s(Torr・L/s) 2.0×103(15)
Hydrogen 4.1×102(3.1)
Pumping capacity Argon Pa・L(Torr・L) 2.1×108(1.6×106)
Hydrogen 9.8×105(7.4×103)
Cooldown time
(Power cycle)
min(Hz) 85/75(50/60)
Mounting flange UVG-300,10BANSI
Compressor unit C30VRT
Weight Kg 40.0

*Mainntenance interval:16,000 hours
*Moveable base is option

Dimension (Unit:mm)


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