CRYO-U12HSP

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CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

The evacuation capacity of argon is about twice that of the standard model (U12H).
The exhaust capacity of hydrogen is about 1.5 times that of the standard model (U12H).
The interval to playback becomes longer, contributing to the improvement of equipment availability.

Specification

Pumping speeds(20℃)	Nitrogen	L/s	4,100
	Hydrogen		6,000
	Argon		3,400
	Water		9,500
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	2.0×10³(15.0)
	Hydrogen		4.1×10²(3.1)
Pumping capacity	Argon	Pa・L(Torr・L)	4.4×10⁸(3.3×10⁶)
	Hydrogen		1.6×10⁶(1.2×10⁴)
Cooldown time (Power cycle)	min(Hz)		90/80(50/60)
Mounting flange			UVG-300,10^BANSI
Compressor unit			C30VRT
Weight		Kg	42

*Maintenance interval：16,000 hours
Moveable base is option

Dimension (Unit:mm)

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Accessories and Consumables

Cryo Pump

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Specification

Pumping speeds(20℃)	Nitrogen	L/s	4,100
	Hydrogen		6,000
	Argon		3,400
	Water		9,500
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	2.0×10³(15.0)
	Hydrogen		4.1×10²(3.1)
Pumping capacity	Argon	Pa・L(Torr・L)	4.4×10⁸(3.3×10⁶)
	Hydrogen		1.6×10⁶(1.2×10⁴)
Cooldown time (Power cycle)	min(Hz)		90/80(50/60)
Mounting flange			UVG-300,10^BANSI
Compressor unit			C30VRT
Weight		Kg	42

*Maintenance interval：16,000 hours
Moveable base is option