Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


  1. The evacuation capacity of argon is about twice that of the standard model (U12H).
  2. The exhaust capacity of hydrogen is about 1.5 times that of the standard model (U12H).
  3. The interval to playback becomes longer, contributing to the improvement of equipment availability.


Pumping speeds(20℃) Nitrogen L/s 4,100
Hydrogen 6,000
Argon 3,400
Water 9,500
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum flow rate Argon Pa・L/s(Torr・L/s) 2.0×103(15.0)
Hydrogen 4.1×102(3.1)
Pumping capacity Argon Pa・L(Torr・L) 4.4×108(3.3×106)
Hydrogen 1.6×106(1.2×104)
Cooldown time
(Power cycle)
min(Hz) 90/80(50/60)
Mounting flange UVG-300,10BANSI
Compressor unit C30VRT
Weight Kg 42

*Maintenance interval:16,000 hours
Moveable base is option

Dimension (Unit:mm)


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