Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


  1. Suitable for medium and large-size equipments.
  2. Suitable for batch type large deposition systems.
  3. Resistant to thermal load.


Pumping sppeds(20℃) Nitrogen L/s 5,000
Hydrogen 10,000
Argon 4,200
Water 16,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum flow rate Argon Pa・L/s(Torr・L/s) 1.4×103(11.0)
Hydrogen 4.1×102(3.1)
Pumping capacity Argon Pa・L(Torr・L) 4.3×108(3.3×106)
Hydrogen 2.4×106(1.8×104)
Cooldown time
(Power cycle)
min(Hz) 110/100(50/60)
Mounting flange UVG-400
Compressor unit C30VRT
Weight Kg 61.0

*Maintenance interval:16,000 hours
*Moveable base is option

Dimension (Unit:mm)


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