CRYO-U16

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Suitable for medium and large-size equipments.
Suitable for batch type large deposition systems.
Resistant to thermal load.

Specification

Pumping sppeds(20℃)	Nitrogen	L/s	5,000
	Hydrogen		10,000
	Argon		4,200
	Water		16,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.4×10³(11.0)
	Hydrogen		4.1×10²(3.1)
Pumping capacity	Argon	Pa・L(Torr・L)	4.3×10⁸(3.3×10⁶)
	Hydrogen		2.4×10⁶(1.8×10⁴)
Cooldown time (Power cycle)	min(Hz)		110/100(50/60)
Mounting flange			UVG-400
Compressor unit			C30VRT
Weight		Kg	61.0

*Maintenance interval：16,000 hours
*Moveable base is option

Dimension (Unit:mm)

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Accessories and Consumables

Cryo Pump

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