CRYO-U20P

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Suitable for large deposition systems and other production equipment.
Suitable for batch type large deposition systems.

Specification

Pumping speeds(20℃)	Nitrogen	L/s	10,000
	Hydrogen		18,000
	Argon		8,400
	Water		29,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.1×10³(8.7)
	Hydrogen		5.0×10²(3.7)
Pumping capacity	Argon	Pa・L(Torr・L)	5.8×10⁸(4.4×10⁶)
	Hydrogen		4.6×10⁶(3.4×10⁴)
Cooldown time (Power cycle)	min(Hz)		180/160(50/60)
Mounting flange			UVG-500
Compressor unit			C30VRT
Weight		Kg	69.0

*Maintenanc e interval：16,000 hours

Dimension (Unit:mm)

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Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

Specification

Pumping speeds(20℃)	Nitrogen	L/s	10,000
	Hydrogen		18,000
	Argon		8,400
	Water		29,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	1.1×10³(8.7)
	Hydrogen		5.0×10²(3.7)
Pumping capacity	Argon	Pa・L(Torr・L)	5.8×10⁸(4.4×10⁶)
	Hydrogen		4.6×10⁶(3.4×10⁴)
Cooldown time (Power cycle)	min(Hz)		180/160(50/60)
Mounting flange			UVG-500
Compressor unit			C30VRT
Weight		Kg	69.0

*Maintenanc e interval：16,000 hours