Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


  • Suitable for large deposition systems and other production equipment.
  • Suitable for batch type large deposition systems.


Pumping speeds(20℃) Nitrogen L/s 10,000
Hydrogen 18,000
Argon 8,400
Water 29,000
Ultimate pressure Pa(Torr) 10-7(10-9)
Maximum flow rate Argon Pa・L/s(Torr・L/s) 1.1×103(8.7)
Hydrogen 5.0×102(3.7)
Pumping capacity Argon Pa・L(Torr・L) 5.8×108(4.4×106)
Hydrogen 4.6×106(3.4×104)
Cooldown time
(Power cycle)
min(Hz) 180/160(50/60)
Mounting flange UVG-500
Compressor unit C30VRT
Weight Kg 69.0

*Maintenanc e interval:16,000 hours

Dimension (Unit:mm)


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