CRYO-U22H

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Features

Suitable for large deposition systems.
Larger pumping speed for water.

Specification

Pumping speeds(20℃)	Nitrogen	L/s	17,000
	Hydrogen		25,000
	Argon		14,000
	Water		39,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	4.1×10³(31)
	Hydrogen		1.3×10³(9.6)
Pumping capacity	Argon	Pa・L(Torr・L)	8.1×10⁸(6.1×10⁶)
	Hydrogen		8.5×10⁶(6.4×10⁴)
Cooldown time (Power cycle)	min(Hz)		150/135 (50/60)
Mounting flange			UVG-550
Compressor unit			C30VRT×2
Weight		Kg	125.0

*Maintenance interval：16,000 hours

U22H,U30H fall under category of export contol products
Corresponds to export control product suach as strategic time
Please take nessecary procedure for Export permisson from Japan goverment

Dimension (Unit:mm)

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Accessories and Consumables

Cryo Pump

Regeneration Gas Purge PR Unit PR1A Regeneration Gas Purge PR Unit PR2A Regeneration Gas Purge PR Unit PR3A Band Heater RBH-6 Band Heater RBH-8 Band Heater RBH-8HSP Band Heater RBH-10 Band Heater RBH-12 Band Heater RBH-16 Band Heater RBH-20 Band Heater RBH-22 Band Heater BH-22P Band Heater RBH-30

Specification

Pumping speeds(20℃)	Nitrogen	L/s	17,000
	Hydrogen		25,000
	Argon		14,000
	Water		39,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow rate	Argon	Pa・L/s(Torr・L/s)	4.1×10³(31)
	Hydrogen		1.3×10³(9.6)
Pumping capacity	Argon	Pa・L(Torr・L)	8.1×10⁸(6.1×10⁶)
	Hydrogen		8.5×10⁶(6.4×10⁴)
Cooldown time (Power cycle)	min(Hz)		150/135 (50/60)
Mounting flange			UVG-550
Compressor unit			C30VRT×2
Weight		Kg	125.0