Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


  • Suitable for large deposition systems.
  • Larger pumping speed for water.


Pumping speeds(20℃) Nitrogen L/s 17,000
Hydrogen 25,000
Argon 14,000
Water 39,000
Ultimate pressure Pa(Torr) 10-7 (10-9)
Maximum flow rate Argon Pa・L/s(Torr・L/s) 4.1×103 (31)
Hydrogen 1.3×103 (9.6)
Pumping capacity Argon Pa・L(Torr・L) 8.1×108 (6.1×106)
Hydrogen 8.5×106 (6.4×104)
Cooldown time
(Power cycle)
min(Hz) 150/135 (50/60)
Mounting flange UVG-550
Compressor unit C30VRT×2
Weight Kg 125.0

*Maintenance interval:16,000 hours

U22H,U30H fall under category of export contol products
Corresponds to export control product suach as strategic time
Please take nessecary procedure for Export permisson from Japan goverment

Dimension (Unit:mm)


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