Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


Pumping speed(20℃) Nitrogen L/s 11,500
Hydrogen 14,000
Argon 9,700
Water 39,000
Ultimate pressure Pa(Torr) 10-7 (10-9)
Maximum flow Argon Pa・L/s(Torr・L/s) 1.7×103 (12.8)
Hydrogen 5.0×102 (3.7)
Pumping capacity Argon Pa・L(Torr・L) 5.8×108 (4.4×106)
Hydrogen 6.0×106 (4.5×104)
Cooldown time
(Power recycle)
min(Hz) 180/170 (50/60)
Mounting flange UVG-550
Compressor unit C30PVRT
Weight Kg 115.0

*Maintenance interval:16,000 hours

Dimensions (mm)


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