Cryo Pump

CRYO-U Series



CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.


Pumping speeds(20℃) Nitrogen L/s 13,000
Hydrogen 16,500
Argon 11,000
Water 39,000
Ultimate pressure Pa(Torr) 10-7 (10-9)
Maximum flow Argon Pa・L/s(Torr・L/s) 3.5×103 (26)
Hydrogen 1.3×103 (9.6)
Pumping capacity Argon Pa・L(Torr・L) 8.1×108 (6.1×106)
Hydrogen 8.5×106 (6.4×104)
Cooldown time
(Power cycles)
min(Hz) 165/150 (50/60)
Mounting flange UVG-550
Compressor unit C30PMVRT×1
Weight Kg 125.0

*Maintenance interval:16,000 hours

Dimensions (mm)


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