CRYO-U22WB

アルバック・クライオ

CRYO-U series is a cryopump that uses a two-stage type GM cryocooler, and It is capable of high vacuum pumping.
A wide range of products from small- to large-type are available according to the applications including FPD, semiconductors, electronic equipment, optics, and R&D.

Specifications

Pumping speeds(20℃)	Nitrogen	L/s	13,000
	Hydrogen		16,500
	Argon		11,000
	Water		39,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow	Argon	Pa・L/s(Torr・L/s)	3.5×10³(26)
	Hydrogen		1.3×10³(9.6)
Pumping capacity	Argon	Pa・L(Torr・L)	8.1×10⁸(6.1×10⁶)
	Hydrogen		8.5×10⁶(6.4×10⁴)
Cooldown time (Power cycles)	min(Hz)		165/150 (50/60)
Mounting flange			UVG-550
Compressor unit			C30PMVRT×1
Weight		Kg	125.0

*Maintenance interval：16,000 hours

Dimensions (mm)

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Accessories and Consumables

Cryo Pump

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Specifications

Pumping speeds(20℃)	Nitrogen	L/s	13,000
	Hydrogen		16,500
	Argon		11,000
	Water		39,000
Ultimate pressure	Pa(Torr)		10^-7(10^-9)
Maximum flow	Argon	Pa・L/s(Torr・L/s)	3.5×10³(26)
	Hydrogen		1.3×10³(9.6)
Pumping capacity	Argon	Pa・L(Torr・L)	8.1×10⁸(6.1×10⁶)
	Hydrogen		8.5×10⁶(6.4×10⁴)
Cooldown time (Power cycles)	min(Hz)		165/150 (50/60)
Mounting flange			UVG-550
Compressor unit			C30PMVRT×1
Weight		Kg	125.0

*Maintenance interval：16,000 hours